Title:
ELECTRET ELEMENT, ELECTROMECHANICAL CONVERTER AND METHOD FOR PRODUCING ELECTRET ELEMENT
Document Type and Number:
WIPO Patent Application WO/2016/129597
Kind Code:
A1
Abstract:
This electret element is provided with an Si layer, an SiO2 layer that is formed on the surface of the Si layer, and an electret that is formed in the SiO2 layer at a position close to the interface with the Si layer.
Inventors:
FUJITA HIROYUKI (JP)
HASHIGUCHI GEN (JP)
ASHIZAWA HISAYUKI (JP)
MITSUYA HIROYUKI (JP)
ISHIBASHI KAZUNORI (JP)
HASHIGUCHI GEN (JP)
ASHIZAWA HISAYUKI (JP)
MITSUYA HIROYUKI (JP)
ISHIBASHI KAZUNORI (JP)
Application Number:
PCT/JP2016/053836
Publication Date:
August 18, 2016
Filing Date:
February 09, 2016
Export Citation:
Assignee:
UNIV TOKYO (JP)
KK SAGINOMIYA SEISAKUSHO (JP)
KK SAGINOMIYA SEISAKUSHO (JP)
International Classes:
H02N1/00
Domestic Patent References:
| WO2015019919A1 | 2015-02-12 |
Foreign References:
| JP5627130B2 | 2014-11-19 | |||
| JP2004114261A | 2004-04-15 | |||
| JP2013013256A | 2013-01-17 |
Other References:
See also references of EP 3244527A4
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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