Title:
ELECTROMAGNETIC WAVE SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/171488
Kind Code:
A1
Abstract:
Provided is an electromagnetic wave sensor wherein influence of the heat of a local heat source on a bolometer film is suppressed. An electromagnetic wave sensor 1 according to the present invention comprises: a first substrate 2; a second substrate 3 which is arranged so as to face the first substrate 2, while forming an internal space 7 between itself and the first substrate 2, and which transmits infrared light; a plurality of bolometer films 8 which are arranged in the internal space 7, while being supported by the second substrate 3; a local heat source 9 which is formed in the first substrate 2; a first electrical connection member 5 which connects the first substrate 2 to the second substrate 3; and a lead 10 which extends on the second substrate 3 or within the second substrate 3 and connects the first electrical connection member 5 to a bolometer film 8.
Inventors:
OHTA NAOKI (JP)
HARA SHINJI (JP)
AOKI SUSUMU (JP)
KOMURA EIJI (JP)
KAIZU AKIMASA (JP)
HARA SHINJI (JP)
AOKI SUSUMU (JP)
KOMURA EIJI (JP)
KAIZU AKIMASA (JP)
Application Number:
PCT/JP2018/008736
Publication Date:
September 12, 2019
Filing Date:
March 07, 2018
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01J1/02
Foreign References:
| JP2010127892A | 2010-06-10 | |||
| JP2011137744A | 2011-07-14 | |||
| JP2013152115A | 2013-08-08 | |||
| JP2000065637A | 2000-03-03 | |||
| JP2007309877A | 2007-11-29 | |||
| JP2003100919A | 2003-04-04 | |||
| JP2014514891A | 2014-06-19 | |||
| JP2013232646A | 2013-11-14 | |||
| JP2003337066A | 2003-11-28 | |||
| JP2000337959A | 2000-12-08 | |||
| JP2016526155A | 2016-09-01 |
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
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