Title:
ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/068218
Kind Code:
A1
Abstract:
This electron beam application device includes: a light source; a photocathode; an anode; detectors; and a control unit. The number of excitation light beams received by the photocathode is two or more. The excitation light beams are each like a pulse, and are emitted such that timings at which the photocathode receives the light beams are different from each other. In one round of detection data creation work, the control unit sets two or more irradiation regions in which the irradiation target is to be irradiated with electron beams, and causes different irradiation regions selected from among the two or more set irradiation regions to be irradiated with two or more pulse-like electron beams formed by reception of the excitation light beams. The detectors generate detection signals by detecting, at different timings, pulse-like discharge objects discharged from the different irradiation regions of the irradiation target, and output the generated detection signals in association with position information of the different irradiation regions. The number of the detectors is less than the number of electron beams with which the irradiation target is irradiated.
Inventors:
NISHITANI TOMOHIRO (JP)
Application Number:
PCT/JP2022/038536
Publication Date:
April 27, 2023
Filing Date:
October 17, 2022
Export Citation:
Assignee:
PHOTO ELECTRON SOUL INC (JP)
International Classes:
H01J37/073; H01J1/34; H01J37/26
Domestic Patent References:
| WO2021084684A1 | 2021-05-06 | |||
| WO2019131410A1 | 2019-07-04 |
Foreign References:
| JP6925090B1 | 2021-08-25 | |||
| JP2002500817A | 2002-01-08 |
Attorney, Agent or Firm:
MATSUMOTO Seiji (JP)
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