Title:
ELECTRON MICROSCOPE HAVING X−RAY SPECTROMETER
Document Type and Number:
WIPO Patent Application WO/2003/036677
Kind Code:
A1
Abstract:
An electron microscope having an X−ray spectrometer of high resolution with a compact optical system. The X−ray spectrometer (10) has a spectrometer chamber (11) from which air is exhausted by vacuum pumps (18, 19, 20). In the spectrometer chamber (11), diffraction grating at different intervals (12) is arranged and at its end, an X−ray detector (14) is mounted. The X−ray spectrometer (1) is mounted on the side wall of the electron microscope via a gate valve (4). Characteristic X−rays emitted from a sample (3) to which an electron beam is applied is incident at a great angle (&agr ) with respect to a normal of the diffraction grating at different intervals and diffracted X−rays from the diffraction grating reach the X−ray detector (14) and are detected by it.
Inventors:
TERAUCHI MASAMI (JP)
Application Number:
PCT/JP2002/001899
Publication Date:
May 01, 2003
Filing Date:
February 28, 2002
Export Citation:
Assignee:
JEOL LTD (JP)
TERAUCHI MASAMI (JP)
TERAUCHI MASAMI (JP)
International Classes:
H01J37/244; H01J37/256; (IPC1-7): H01J37/252; G01N23/225; G21K1/06; H01J37/244
Foreign References:
| JPS5047682A | 1975-04-28 | |||
| JPH0676780A | 1994-03-18 | |||
| JPH07209216A | 1995-08-11 | |||
| JPH0566599U | 1993-09-03 | |||
| JP2000146692A | 2000-05-26 | |||
| JP2000039359A | 2000-02-08 | |||
| JPH0599863A | 1993-04-23 |
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