Title:
ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2021/240945
Kind Code:
A1
Abstract:
An electrostatic chuck 20 comprises: a disc-shaped ceramic plate 22 having a wafer mounting surface 22a on a surface thereof; an electrostatic electrode 30 embedded in the ceramic plate 22; and gas grooves 25a to 25g which, when the ceramic plate 22 is viewed from above, are divided into a plurality of zones Z1 to Z7, and are provided independently on the wafer mounting surface 22a so as to extend from one to the other of a pair of gas supply and discharge openings 26, 27 in each zone.
Inventors:
KUNO TATSUYA (JP)
Application Number:
PCT/JP2021/009255
Publication Date:
December 02, 2021
Filing Date:
March 09, 2021
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H01L21/683
Foreign References:
| JP2009188162A | 2009-08-20 | |||
| JP2010141081A | 2010-06-24 | |||
| JP2003068834A | 2003-03-07 | |||
| JP2006344670A | 2006-12-21 | |||
| JP2020068350A | 2020-04-30 | |||
| JP2005079415A | 2005-03-24 | |||
| JP2018503969A | 2018-02-08 | |||
| US20200118800A1 | 2020-04-16 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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