Title:
ELECTROSTATIC DEVICE AND OPERATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/153676
Kind Code:
A1
Abstract:
An electrostatic device according to one embodiment of the present invention comprises: an electrostatic electrode layer; a dielectric layer arranged on the electrostatic electrode layer; and a ring-shaped protrusion part arranged and formed on an edge of the dielectric layer, wherein the protrusion part forms a concave area, the concave area is filled with a cooling gas, and the protrusion part comprises a flat area and a surface treatment area to which a roughening treatment has been performed.
Inventors:
LEE PYUNG-WOO (KR)
LEE SEUNGHO (KR)
SHIN TAEHO (KR)
JEON BUIL (KR)
LIM DOOHO (KR)
PARK JUNGSU (KR)
KONG JIN WON (KR)
ON BUMSOO (KR)
LEE SEUNGHO (KR)
SHIN TAEHO (KR)
JEON BUIL (KR)
LIM DOOHO (KR)
PARK JUNGSU (KR)
KONG JIN WON (KR)
ON BUMSOO (KR)
Application Number:
PCT/KR2023/001101
Publication Date:
August 17, 2023
Filing Date:
January 25, 2023
Export Citation:
Assignee:
INNOVATION FOR CREATIVE DEVICES CO LTD (KR)
International Classes:
H01L21/683; B23Q3/15; H01L21/67; H02N13/00
Foreign References:
| JP2001517872A | 2001-10-09 | |||
| KR20090115409A | 2009-11-05 | |||
| KR20110061506A | 2011-06-09 | |||
| KR20160118259A | 2016-10-11 | |||
| CN112018021A | 2020-12-01 |
Attorney, Agent or Firm:
NURY PATENT LAW FIRM (KR)
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