Title:
EUV-TRANSMISSIVE FILM, METHOD FOR USING SAME, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2024/057500
Kind Code:
A1
Abstract:
Provided is an EUV-transmissive film in which EUV absorption by a protective layer causing a decrease in EUV transmittance can be suppressed, thereby enabling exhibition of high EUV transmittance at the time of exposure. The EUV-transmissive film comprises: a main layer (12) formed of a single layer or a composite layer including two or more layers and having an EUV transmittance of 85% or higher at a wavelength of 13.5 nm; and a protective layer (14) covering at least one side of the main layer and containing, as a major component, at least one selected from the group consisting of amorphous carbon, Cu, Al, and organic resist.
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Inventors:
GORIKI NAOKI (JP)
TANIMURA TAKASHI (JP)
KASHIWAYA TOSHIKATSU (JP)
CHAEN HIROKI (JP)
TANIMURA TAKASHI (JP)
KASHIWAYA TOSHIKATSU (JP)
CHAEN HIROKI (JP)
Application Number:
PCT/JP2022/034607
Publication Date:
March 21, 2024
Filing Date:
September 15, 2022
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G03F1/62
Domestic Patent References:
| WO2021018777A1 | 2021-02-04 |
Foreign References:
| JP2017522590A | 2017-08-10 | |||
| KR20210047455A | 2021-04-30 | |||
| KR20200076258A | 2020-06-29 | |||
| JPH0558817B2 | 1993-08-27 | |||
| JP2020098227A | 2020-06-25 |
Attorney, Agent or Firm:
TAKAMURA Masaharu et al. (JP)
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