Title:
EUV TRANSMISSIVE FILM
Document Type and Number:
WIPO Patent Application WO/2024/057499
Kind Code:
A1
Abstract:
Provided is an EUV transmissive film from which particles are unlikely to be generated even when the film is damaged by any chance. This EUV transmissive film is provided with: a main layer that is formed of metallic beryllium and that has a first face and a second face; and a pair of surface layers that are provided on the first face and the second face of the main layer, and that contain at least one fluoride selected from beryllium fluoride, nitrided beryllium fluoride, oxidized beryllium fluoride, and oxidized-nitrided beryllium fluoride.
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Inventors:
KASHIWAYA TOSHIKATSU (JP)
GORIKI NAOKI (JP)
TANGE SHOJI (JP)
KONDO ATSUO (JP)
GORIKI NAOKI (JP)
TANGE SHOJI (JP)
KONDO ATSUO (JP)
Application Number:
PCT/JP2022/034591
Publication Date:
March 21, 2024
Filing Date:
September 15, 2022
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G03F1/62
Domestic Patent References:
| WO2021037662A1 | 2021-03-04 |
Foreign References:
| JP2017083791A | 2017-05-18 | |||
| JP2018151622A | 2018-09-27 | |||
| JP2018077412A | 2018-05-17 | |||
| JPH0558817B2 | 1993-08-27 | |||
| JP2018194840A | 2018-12-06 | |||
| JP2018537720A | 2018-12-20 |
Attorney, Agent or Firm:
TAKAMURA Masaharu et al. (JP)
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