Title:
EXCHANGING DEVICE AND EXCHANGING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/220753
Kind Code:
A1
Abstract:
An exchanging device exchanges machine tools being used by a machining device. The machining device is provided with a holding part that holds a processing body, a machining mechanism to which a machine tool for machining the processing body held by the holding unit is attached in an exchangeable manner, and an external cover that accommodates the holding part and the machining mechanism. The exchange device comprises an exchange mechanism, a movement mechanism, a travel base, and a travel mechanism. The exchange mechanism attaches the machine tool to the machining mechanism or removes the machine tool from the machining mechanism. The movement mechanism causes the exchange mechanism to move from outside the external cover to inside the external cover via an entry opening in the external cover. The travel base supports the movement mechanism. The travel mechanism causes the travel base to travel.
Inventors:
MIZOMOTO YASUTAKA (JP)
HAYAKAWA SUSUMU (JP)
HAYAKAWA SUSUMU (JP)
Application Number:
PCT/JP2021/014827
Publication Date:
November 04, 2021
Filing Date:
April 07, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B24B45/00; B23Q3/155
Domestic Patent References:
| WO2020049701A1 | 2020-03-12 |
Foreign References:
| JP2012183629A | 2012-09-27 | |||
| JP2012056024A | 2012-03-22 | |||
| JP2010017796A | 2010-01-28 | |||
| JPH08229812A | 1996-09-10 | |||
| JP2012232397A | 2012-11-29 | |||
| JP2002144183A | 2002-05-21 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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