Title:
MACHINING DEVICE, AND METHOD FOR ATTACHING MACHINE TOOL TO MACHINING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/220752
Kind Code:
A1
Abstract:
A machining device comprising a holding unit that holds a processing object, a machining mechanism to which a machine tool for machining the processing object held by the holding unit is attached in an exchangeable manner, and an external cover that accommodates the holding unit and the machining mechanism. The external cover has an entry opening through which an exchange device of the machine tool passes when entering the external cover from outside of the external cover. The machining device furthermore comprises a shutter that opens and closes the entry opening in the external cover.
Inventors:
MIZOMOTO YASUTAKA (JP)
HAYAKAWA SUSUMU (JP)
HAYAKAWA SUSUMU (JP)
Application Number:
PCT/JP2021/014826
Publication Date:
November 04, 2021
Filing Date:
April 07, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B24B45/00; B23Q11/08; B24B55/06; H01L21/304
Domestic Patent References:
| WO2020049701A1 | 2020-03-12 |
Foreign References:
| JP2014205231A | 2014-10-30 | |||
| JPH11274271A | 1999-10-08 | |||
| JPH10340872A | 1998-12-22 | |||
| JP2015093367A | 2015-05-18 | |||
| JP2009050976A | 2009-03-12 | |||
| JP2000052185A | 2000-02-22 | |||
| JPH08257899A | 1996-10-08 | |||
| JP2017094468A | 2017-06-01 | |||
| JP2008080409A | 2008-04-10 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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