Title:
EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/150530
Kind Code:
A1
Abstract:
This extreme ultraviolet light generating device is provided with: (A) a chamber; (B) an optical unit; (C) a chamber reference member that is provided with a housing chamber for housing the optical unit; (D) a height positioning mechanism that positions, at a predetermined installation position in the housing chamber, the height of the optical unit to a predetermined installation height in a state wherein the height positioning mechanism is in contact with a first portion of the optical unit; and (E) a moving mechanism that linearly moves the optical unit in the horizontal direction in the housing chamber by keeping the height of the optical unit at a guide height. The moving mechanism includes: a guide member that is provided with a guide surface for guiding the optical unit to the installation position in a state wherein the guide surface is in contact with a second portion of the optical unit; and a retracting section, which is provided to the guide member, and which retracts the second portion from the guide surface in a state wherein the optical unit has reached the installation position. The guide height of the optical unit while the optical unit is moving by being guided toward the installation position by means of the guide surface is substantially identical to the installation height.
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Inventors:
TAKAYAMA AKIHIRO (JP)
Application Number:
PCT/JP2017/005851
Publication Date:
August 23, 2018
Filing Date:
February 17, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H01S3/02; H05G2/00
Domestic Patent References:
| WO2016171158A1 | 2016-10-27 | |||
| WO2015075838A1 | 2015-05-28 |
Foreign References:
| JP2013175431A | 2013-09-05 | |||
| JP2013048202A | 2013-03-07 | |||
| JP2011029587A | 2011-02-10 | |||
| JP2010080941A | 2010-04-08 | |||
| JP2005233828A | 2005-09-02 |
Attorney, Agent or Firm:
MATSUURA Kenzo (JP)
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