Title:
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/229855
Kind Code:
A1
Abstract:
This extreme ultraviolet light generation device is provided with: (A) a chamber for generating extreme ultraviolet light by bringing a target material into a plasma state by irradiating the target material with laser light; (B) a vessel, i.e., a cylindrical member that constitutes the chamber; (C) a reference member that supports the vessel; (D) a collector mirror, which collects extreme ultraviolet light in the chamber, and which is disposed in the chamber by being replaceably attached to the reference member and being covered with the vessel; and (E) a vessel moving mechanism, which is provided to the reference member, and which moves the vessel, said vessel moving mechanism moving the vessel between a first position, at which the vessel covers the collector mirror, and a second position, at which the vessel is retracted from the first position, and exposes the collector mirror.
Inventors:
FUKUDA OSAMU (JP)
Application Number:
PCT/JP2017/021759
Publication Date:
December 20, 2018
Filing Date:
June 13, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; G21K5/02; H05G1/00
Domestic Patent References:
| WO2016171158A1 | 2016-10-27 |
Foreign References:
| JP2013175431A | 2013-09-05 | |||
| JP2013069655A | 2013-04-18 | |||
| JP2011029587A | 2011-02-10 | |||
| JP2008118020A | 2008-05-22 | |||
| JP2008108599A | 2008-05-08 | |||
| JP2004128105A | 2004-04-22 | |||
| JP2004103961A | 2004-04-02 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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