Title:
FILM BULK ACOUSTIC RESONATOR HAVING MULTIPLE BOTTOM ELECTRODE LAYERS, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/006089
Kind Code:
A1
Abstract:
The present invention relates to a film bulk acoustic resonator and a manufacturing method therefor. The resonator comprises a substrate, a bottom electrode, a top electrode, and a piezoelectric layer. The bottom electrode comprises multiple electrode layers, the multiple electrode layers at least comprise a first electrode layer and a second electrode layer provided in a thickness direction of the resonator, and the first electrode layer and the second electrode layer are made of different materials. The resonator further comprises multiple barrier layers, which comprise at least a first barrier layer and a second barrier layer. The first electrode layer covers at least a part of the upper side of the first barrier layer in a surface contact manner, and the second electrode layer covers at least a part of the upper side of the second barrier layer in a surface contact manner. The present invention also relates to a filter and an electronic device.
More Like This:
| JPS5962207 | LITAO3 PIEZOELECTRIC STRIP OSCILLATOR |
| JPS55134525 | ELASTIC SURFACE-WAVE FILTER |
| JPS5466793 | PIEZOELECTRIC OSCILLATOR |
Inventors:
XU YANG (CN)
PANG WEI (CN)
HAO LONG (CN)
ZHANG WEI (CN)
PANG WEI (CN)
HAO LONG (CN)
ZHANG WEI (CN)
Application Number:
PCT/CN2022/109099
Publication Date:
February 02, 2023
Filing Date:
July 29, 2022
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02; H03H3/02
Foreign References:
| CN106899275A | 2017-06-27 | |||
| CN111010133A | 2020-04-14 | |||
| US20190326880A1 | 2019-10-24 | |||
| US20180034438A1 | 2018-02-01 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
Download PDF: