Title:
FILM PIEZOELECTRIC ACOUSTIC WAVE FILTER AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/147646
Kind Code:
A1
Abstract:
Disclosed in the present invention are a film piezoelectric acoustic wave filter and a manufacturing method therefor. The film piezoelectric acoustic wave filter comprises: a first substrate; a plurality of acoustic wave resonator units arranged on the first substrate, wherein each acoustic wave resonator unit comprises a piezoelectric induction sheet body, and a first electrode and a second electrode which are used for applying a voltage to the piezoelectric induction sheet body and are opposite each other; and a cap layer located on the first substrate, wherein the cap layer is provided with a plurality of sub caps, the sub caps surround the acoustic wave resonator units so as to form first cavities between the acoustic wave resonator units and the sub caps, and an isolation portion is arranged between adjacent sub caps, so as to isolate adjacent first cavities from one another. According to the present invention, the independent first cavities are formed above the acoustic wave resonator units by means of integrally forming the cap layer, the plurality of acoustic wave resonance units are encapsulated, self-sealing of the resonance units is realized, and the encapsulation process is convenient and efficient. Compared with a conventional cavity, the size of the first cavity is significantly reduced, the structural strength required by the cap layer is reduced, and the problem of the cap layer collapsing because of the cavity can be prevented.
Inventors:
LUO HAILONG (CN)
LI WEI (CN)
LI WEI (CN)
Application Number:
PCT/CN2020/142245
Publication Date:
July 29, 2021
Filing Date:
December 31, 2020
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORP (CN)
International Classes:
H03H9/64; H01L41/00; H03H3/02; H03H9/54
Foreign References:
| CN112039489A | 2020-12-04 | |||
| CN112039491A | 2020-12-04 | |||
| CN103947111A | 2014-07-23 | |||
| CN108667437A | 2018-10-16 | |||
| KR20100033129A | 2010-03-29 | |||
| US20070001551A1 | 2007-01-04 |
Attorney, Agent or Firm:
BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
Download PDF: