Title:
FLEXIBLE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2010/016207
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a flexible semiconductor device characterized by comprising (i) a step of forming an insulating film on the upper surface of metal foil, (ii) a step of forming an extraction electrode pattern on the upper surface of the metal foil, (iii) a step of forming a semiconductor layer on the insulating film in such a manner that the semiconductor layer is in contact with the extraction electrode pattern, (iv) a step of forming a sealing resin layer on the upper surface of the metal foil in such a manner that the sealing resin layer covers the semiconductor layer and the extraction electrode pattern, and (v) a step of forming electrodes by etching the metal foil, wherein the metal foil is used as a support for the insulating film, the extraction electrode pattern, the semiconductor layer, and the sealing resin layer formed in (i) to (iv) and used as a constituent material for the electrodes in (v). A TFT element can be fabricated by a simple process because the metal foil serving as the support need not be finally stripped off. Further, a high-temperature process can be introduced to the fabrication of the insulating film and the semiconductor layer because the metal foil is used as the support, whereby the TFT characteristic is improved.
Inventors:
HIRANO KOICHI
NAKATANI SEIICHI
OGAWA TATSUO
ICHIRYU TAKASHI
SUZUKI TAKESHI
NAKATANI SEIICHI
OGAWA TATSUO
ICHIRYU TAKASHI
SUZUKI TAKESHI
Application Number:
PCT/JP2009/003616
Publication Date:
February 11, 2010
Filing Date:
July 30, 2009
Export Citation:
Assignee:
PANASONIC CORP (JP)
HIRANO KOICHI
NAKATANI SEIICHI
OGAWA TATSUO
ICHIRYU TAKASHI
SUZUKI TAKESHI
HIRANO KOICHI
NAKATANI SEIICHI
OGAWA TATSUO
ICHIRYU TAKASHI
SUZUKI TAKESHI
International Classes:
H01L21/20; H01L21/336; H01L29/417; H01L29/423; H01L29/49; H01L29/786
Domestic Patent References:
| WO2009063583A1 | 2009-05-22 | |||
| WO2009069248A1 | 2009-06-04 |
Foreign References:
| JP2003258264A | 2003-09-12 | |||
| JP2005123290A | 2005-05-12 | |||
| JP2005166742A | 2005-06-23 | |||
| JP2006269475A | 2006-10-05 | |||
| JP2007073857A | 2007-03-22 | |||
| JP2007067263A | 2007-03-15 | |||
| JP2004297084A | 2004-10-21 | |||
| JP2008200766A | 2008-09-04 | |||
| JP2008200767A | 2008-09-04 |
Other References:
See also references of EP 2312620A4
Attorney, Agent or Firm:
TANAKA, Mitsuo et al. (JP)
Mitsuo Tanaka (JP)
Mitsuo Tanaka (JP)
Download PDF: