Title:
FLOW CONTROL DEVICE AND FLOW CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2006/100852
Kind Code:
A1
Abstract:
A flow control device and a flow control method capable of controlling a flow at high rangeability while maintaining high controllability. The flow control device comprises fluid pipelines (1), (2), (4), and (5) and a flat plate-like valve support substrate (3) disposed midway in the fluid pipelines. A plurality of independently operable opening/closing valves (11) are installed in the valve support substrate (3). Thus, flow control at high rangeability can be performed by opening and closing the specific opening/closing valve properly selected from among the plurality of opening/closing valves (11).
Inventors:
NOHMI MOTOHIKO (JP)
Application Number:
PCT/JP2006/302849
Publication Date:
September 28, 2006
Filing Date:
February 17, 2006
Export Citation:
Assignee:
EBARA CORP (JP)
NOHMI MOTOHIKO (JP)
NOHMI MOTOHIKO (JP)
International Classes:
G05D7/00; G05D7/01
Foreign References:
| JPH0878340A | 1996-03-22 | |||
| JPH07210253A | 1995-08-11 | |||
| JPH0863235A | 1996-03-08 | |||
| JPH05324089A | 1993-12-07 |
Attorney, Agent or Firm:
Shamoto, Ichio (Section 206 New Ohtemachi Bldg., 2-1,
Ohtemachi 2-chom, Chiyoda-ku Tokyo 04, JP)
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