Title:
FLOW RATE SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/004373
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a flow rate sensor element that has excellent omnidirectional sensor sensitivity. A flow rate sensor element (1) of the present invention is characterized by being equipped with a spherical substrate (2), and a temperature-sensitive film pattern (3) which has been formed on the entire surface of the substrate and has an electrical resistance value that changes as the temperature changes. In the present invention, the temperature-sensitive film pattern is preferably formed by trimming a temperature-sensitive film that has been formed on the surface of the substrate. In this flow rate sensor element, the temperature-sensitive film pattern can be arranged over the entire surface of the spherical substrate, thus making it possible to obtain a constant sensor sensitivity irrespective of the fluid direction and to improve the flow rate detection accuracy.
Inventors:
SHIMODAIRA MASAHIRO (JP)
MIURA KATSUYA (JP)
MIURA KATSUYA (JP)
Application Number:
PCT/JP2021/022792
Publication Date:
January 06, 2022
Filing Date:
June 16, 2021
Export Citation:
Assignee:
KOA CORP (JP)
International Classes:
G01P5/12
Foreign References:
| JPS63210666A | 1988-09-01 | |||
| JPS61133866A | 1986-06-21 | |||
| JPH10281839A | 1998-10-23 | |||
| US20180045751A1 | 2018-02-15 | |||
| US20120137765A1 | 2012-06-07 |
Attorney, Agent or Firm:
AOKI, Hiroyoshi et al. (JP)
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