Title:
FLOWRATE CONTROL UNIT
Document Type and Number:
WIPO Patent Application WO/2019/049291
Kind Code:
A1
Abstract:
Provided is a flowrate control unit that can be downsized. Since a flowrate control unit (1) is configured such that flowrate control devices (11) are connected to a manifold (2) by using joints (91) which can be each divided into a joint adaptor (71) and a joint adaptor (81), each of the flowrate control devices (11) can be attached to/removed from the manifold (2) without using a tool. Thus, as there is no need to secure a space for inserting a tool, the attaching pitch between the adjacent flowrate control devices (11) (joints 91) can be limited to a minimum, and the flowrate control unit (1) can be reduced in size.
Inventors:
SHIMIZU KENICHI (JP)
KAMIDURU YUKI (JP)
KAWAMOTO TAKAHIRO (JP)
MIKUMO KOUICHI (JP)
KAMIDURU YUKI (JP)
KAWAMOTO TAKAHIRO (JP)
MIKUMO KOUICHI (JP)
Application Number:
PCT/JP2017/032375
Publication Date:
March 14, 2019
Filing Date:
September 07, 2017
Export Citation:
Assignee:
TOFLO CORP (JP)
International Classes:
F16K27/00; G05D7/06
Foreign References:
| JP2006009969A | 2006-01-12 | |||
| US20080224078A1 | 2008-09-18 | |||
| JP2017174427A | 2017-09-28 |
Attorney, Agent or Firm:
KAYAHARA Yuji (JP)
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