Title:
FLUID CONTROL DEVICE, FLUID SUPPLY SYSTEM, AND FLUID SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2022/004349
Kind Code:
A1
Abstract:
A fluid control device 10 comprises: a valve device V2 which includes an actuator 22, 24 for opening and closing a flow path and for adjusting the flow rate of fluid that flows through the flow path; a pressure sensor PT which is provided upstream from the valve device V2; and a control circuit 12 which is connected to the valve device V2 and the pressure sensor PT. In a state in which the side upstream from the fluid control device is closed and the valve device is opened using the actuator, the control circuit 12 controls the operation of the actuator on the basis of pressure measured by the pressure sensor PT and a reference pressure drop curve.
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Inventors:
TAKIMOTO MASAHIKO (JP)
YOSHIDA TOSHIHIDE (JP)
SHINOHARA TSUTOMU (JP)
NISHINO KOUJI (JP)
YOSHIDA TOSHIHIDE (JP)
SHINOHARA TSUTOMU (JP)
NISHINO KOUJI (JP)
Application Number:
PCT/JP2021/022624
Publication Date:
January 06, 2022
Filing Date:
June 15, 2021
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K37/00; F16K31/02; G05D7/06
Domestic Patent References:
| WO2005124492A1 | 2005-12-29 | |||
| WO2019171593A1 | 2019-09-12 | |||
| WO2018180745A1 | 2018-10-04 | |||
| WO2018021327A1 | 2018-02-01 | |||
| WO2019102882A1 | 2019-05-31 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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