Title:
FLUID CONTROL SYSTEM AND FLOW RATE MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2019/026700
Kind Code:
A1
Abstract:
A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10); a flow rate measurement device (30) provided downstream of the first valve (21) and comprising a second valve (22); an open-close detector (26) provided to the second valve (22); and a controller (25) that controls the opening/closing of the first valve (21) and the second valve (22). The controller (25) controls the opening/closing of the first valve (21) according to a signal output by the open-close detector (26).
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Inventors:
YAMASHITA SATORU (JP)
SAWADA YOHEI (JP)
NAGASE MASAAKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
SAWADA YOHEI (JP)
NAGASE MASAAKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2018/027755
Publication Date:
February 07, 2019
Filing Date:
July 24, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06
Domestic Patent References:
| WO2012093436A1 | 2012-07-12 |
Foreign References:
| JP2000305630A | 2000-11-02 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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