Title:
FORK HORIZONTALITY SENSING DEVICE OF WAFER TRANSFER ROBOT
Document Type and Number:
WIPO Patent Application WO/2022/107981
Kind Code:
A1
Abstract:
The present invention relates to a wafer transfer device that withdraws wafers out of a Foup to load same on a boat, and relates to a technology capable of preventing a wafer failure from occurring during a wafer transfer process, by checking in advance, before the transfer operation of wafers, the horizontality of forks for moving wafers.
Inventors:
KIM DONGMOON (KR)
AN HYUNGTAE (KR)
AN HYUNGTAE (KR)
Application Number:
PCT/KR2020/017731
Publication Date:
May 27, 2022
Filing Date:
December 07, 2020
Export Citation:
Assignee:
GION CO LTD (KR)
International Classes:
H01L21/67; H01L21/677; H01L21/68
Foreign References:
| KR20140011196A | 2014-01-28 | |||
| KR20170023347A | 2017-03-03 | |||
| KR20080086838A | 2008-09-26 | |||
| KR20120138339A | 2012-12-26 | |||
| US20170358479A1 | 2017-12-14 |
Attorney, Agent or Firm:
HAEDAM INT'L PATENT & LAW FIRM (KR)
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