Title:
GALVANO SCANNER AND LASER MACHINING DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2022/080247
Kind Code:
A1
Abstract:
This galvano scanner, which scans a laser beam, comprises: a galvano unit (110) having a mirror and a mirror drive mechanism; a base member (120) equipped with the galvano unit (110); outer peripheral members (130) that are disposed so as to enclose the galvano unit (110); and a frame member (140) to which the base member (120) and the outer peripheral members (130) are attached. The base member (120) and the outer peripheral members (130) are configured so as to be attached to the frame member (140) via sealing members (150).
Inventors:
MURAKAMI YOSHINORI (JP)
Application Number:
PCT/JP2021/037290
Publication Date:
April 21, 2022
Filing Date:
October 08, 2021
Export Citation:
Assignee:
FANUC CORP (JP)
International Classes:
G02B26/10; B23K26/082; G02B26/08
Foreign References:
| JP2020122961A | 2020-08-13 | |||
| JP2017116588A | 2017-06-29 | |||
| JP2019000851A | 2019-01-10 | |||
| US20200023461A1 | 2020-01-23 | |||
| JP2004195491A | 2004-07-15 |
Attorney, Agent or Firm:
AIWA INTERNATIONAL PATENT AGENCY (JP)
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