Title:
GAS CLUSTER ION BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/248856
Kind Code:
A1
Abstract:
Provided is a GCIB device capable of changing the energy of ions to be emitted, without changing: the extraction electrode arrangement optimized at a specific voltage; the electrode arrangement of the GCIB device having a permanent-magnet type magnet for effectively removing monovalent monomer ions using said voltage; or the magnetic field intensity of the permanent-magnet type magnet. The GCIB device is provided with, in addition to first to third high-voltage power sources (22a)-(22c), another high-voltage power source (22d) that generates a positive or negative high voltage, and another high-voltage application circuit (27) that applies, from the high-voltage power source (22d), another positive or negative high-voltage to a ground electrode part of an extraction electrode (7) and to ground electrode parts of electrostatic lenses (9a, 9b).
Inventors:
TOKIGUCHI KATSUMI
HANAZONO KATSUMI
KATAOKA IZUMI
HANAZONO KATSUMI
KATAOKA IZUMI
Application Number:
PCT/JP2023/021820
Publication Date:
December 28, 2023
Filing Date:
June 13, 2023
Export Citation:
Assignee:
IIPT INC (JP)
International Classes:
H01J37/04; H01J27/20; H01J37/08; H01J37/12; H01J37/248; H01J37/305
Foreign References:
| JP6632937B2 | 2020-01-22 | |||
| JP2017152089A | 2017-08-31 | |||
| JPS63216257A | 1988-09-08 | |||
| JPS61110764A | 1986-05-29 |
Attorney, Agent or Firm:
NISHIURA & ASSOCIATES (JP)
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