Description

GAS GUIDE APPARATUS

Technical Field

[1] The present invention relates to a waste gas induction apparatus, and more particularly, to a waste gas induction apparatus, in which it can minimize the accumulation of unreacted byproducts within a vacuum pipe and an exhaust pipe, which is incurred by unreacted byproducts generating in a semiconductor or LCD manufacturing apparatus. Background Art

[2] In general, the LCD manufacturing and semiconductor manufacturing process mainly consists of a pre process (a fabrication process) and a post process (an assembly process). The term "pre process" refers to a process of fabricating so-called chips by repeatedly performing a process of depositing a thin film on a substrate and selectively etching the deposited thin film within various process chambers, thus forming a specific pattern. The term "post process" refers to a process of individually separating the chip fabricated in the pre process and combining the separated chips to a lead frame to form finished goods.

[3] The process of depositing the thin film on the substrate or etching the thin film deposited on the substrate is performed within the process chamber using detrimental gases, such as silane, arsine and boron chloride, and a process gas such as hydrogen at high temperature. While the process is carried out, a great amount of a variety of ignition gases, corrosive alien substance, and detrimental gases containing noxious components is generated within the process chamber.

[4] For this reason, in the LCD and semiconductor manufacturing apparatus, a scrubber that purifies an exhaust gas discharged from the process chamber and then discharges the purified gas into the atmosphere is disposed at the rear end of the vacuum pump for evacuating the process chamber.

[5] However, the exhaust gas discharged from the process chamber, i.e., unreacted byproducts are solidified and then changed into powder, if it is brought in contact with the atmosphere or an ambient temperature is low. The powder sticks to an exhaust line to raise an exhaust pressure. Furthermore, if the power is introduced into the vacuum pump, it causes failure of the vacuum pump and a back current of the exhaust gas. Therefore, a problem arises because the substrate within the process chamber is contaminated.

[6] To solve the problems, there has been much research done in order to supply the exhaust gas into the exhaust line with it being heated.

[7] Fig. 1 is a cross-sectional view of a waste gas induction apparatus in the related art.

Fig. 2 is an enlarge view of a region A in Fig. 1.

[8] Referring to Figs. 1 and 2, the waste gas induction apparatus in the related art includes an inflow transfer 10, a transfer cap 20, a discharge transfer 30, a high- pressure gas chamber 40, a heating chamber 50, an eruption groove 60, a burn- prevention cap 70 and a temperature sensor 80.

[9] The inflow transfer 10 has an inflow port formed at its outer surface and a fixed rib

11 formed on its inner circumferential surface. The discharge transfer 30 has a support rib, which is supported by a fixed rib, on its outer circumferential surface. The eruption groove 60 that communicates with the inflow port is disposed between the inner circumferential surface of the inflow transfer 10 and the bottom of the discharge transfer 30. The high-pressure gas chamber 40 that communicates with the eruption groove 60 is also disposed between the outer circumferential surface of the discharge transfer 30 and the inner circumferential surface of the inflow transfer 10. Therefore, the discharge transfer 30 is inserted into the inflow transfer 10.

[10] Furthermore, the transfer cap 20 has its bottom portion coupled to a top portion of the inflow transfer 10 while surrounding the discharge transfer 30. The heating chamber 50 is disposed around the inflow transfer 10 and the transfer cap 20. Electric heat lines 51 are wound within the heating chamber 50. The temperature sensor 80 controls a temperature of the electric heat lines 51. The burn-prevention cap 70 surrounds the outer surface of the heating chamber 50 with a predetermined distance therebetween.

[11] In the waste gas induction apparatus constructed above, if an external exhaust gas is introduced into the inflow transfer 10, the waste gas induction apparatus operates to supply an additional nitrogen gas to the high-pressure gas chamber 40. At this time, the electric heat lines 51 of the heating chamber 50 disposed outside the high-pressure gas chamber 40 are powered to heat the nitrogen gas introduced into the high-pressure gas chamber 40. Therefore, if the heated nitrogen gas of a high-pressure is full within the high-pressure gas chamber 40 and the exhaust gas is introduced through the inflow transfer 10, the heated nitrogen gas of a high-pressure and the exhaust gas are mixed through the eruption groove 60 and then discharged to the outside through the discharge transfer 30.

[12] As described above, the nitrogen gas heated at high temperature and the exhaust gas are mixed and the mixed gas is supplied to the pipe with the temperature of the exhaust gas being raised. Therefore, particle powder is not formed due to the exhaust gas within the pipe.

[13] In the prior art waste gas induction apparatus constructed above, however, the electric heat lines 51 of the heating chamber 50 that heats the nitrogen gas are

controlled through the temperature sensor 80 disposed externally. That is, the temperature sensor 80 senses a change in temperature of the electric heat lines 51 and an additional temperature controller (not shown) controls power applied to the electric heat lines 51.

[14] Therefore, an additional controller having a complicate circuit structure for controlling a temperature has to be added and a unit price of a product rises accordingly. This also makes it difficult to construct circuits within the controller. Furthermore, as shown in Fig. 2, additional lines, such as a line for gas input and a line for power, are disposed outside the waste gas induction apparatus. The waste gas induction apparatus may be easily cut or bent when being disposed between the pipes. Therefore, a problem arises because the waste gas induction apparatus is not smoothly mounted.

Disclosure of Invention Technical Problem

[15] Accordingly, the present invention has been made in view of the above problems and it is an object of the present invention to provide a waste gas induction apparatus, in which unreacted byproducts, which are accumulated between a process chamber and a vacuum pump, within a subsequent exhaust line of the vacuum pump, within vacuum pipes disposed at the front and rear ends of a gas scrubber, and/or within an exhaust pipe, in a process of generating incomplete unreacted byproducts other than normal reaction in a semiconductor or LCD manufacturing apparatus, can be minimized and overheating of a product can be prevented employing bimetal, and assembly is easy. Technical Solution

[16] A waste gas induction apparatus according to the present invention includes a gas inlet and a gas outlet, a gas feeder disposed between the gas inlet and the gas outlet, for mixing a waste gas and a nitrogen gas of a high temperature high pressure, a high- pressure gas chamber that supplies the nitrogen gas of the high temperature high pressure to the gas feeder, a heating chamber disposed at one side of the high-pressure gas chamber, for heating the nitrogen gas, and a control box including a nitrogen injection port for supplying the nitrogen gas to the high-pressure gas chamber and a control circuit unit for applying power to the heating chamber.

[17] The waste gas induction apparatus may further include a burn-prevention cap disposed outside the gas inlet and the gas outlet.

[18] A fixed rib that fixes the gas feeder may be disposed within the gas inlet.

[19] The waste gas induction apparatus may further include electric heat lines disposed within the heating chamber.

[20] The control circuit unit may include a power supply port connected to an external

power source, for supplying power to electric heat lines disposed within the heating chamber, a switch element disposed on one line of the power supply port, for controlling the operation of the electric heat lines, a bimetal unit disposed on the other line of the power supply port, for preventing the heat of the electric heat lines 151 from excessively rising, and a LED lamp unit, which is connected to the two lines of the power supply port and emits light.

[21] The waste gas induction apparatus may further include a dimmer switch disposed between the switch element and the electric heat lines, for controlling a voltage applied to the electric heat lines.

[22] The control circuit unit may include a power supply port connected to an external power source, for supplying power to electric heat lines disposed within the heating chamber, a switch element disposed on one line of the power supply port, for controlling the operation of the electric heat lines, a dimmer switch disposed between the switch element and the electric heat lines, for controlling a voltage applied to the electric heat lines, and a LED lamp unit, which is connected to the two lines of the power supply port and emits light.

[23] Furthermore, the gas inlet may have a hollow body, and have one end in which the gas inlet is disposed and the other end in which a short rib part coupled to the gas outlet is formed. The gas outlet may have a hollow body, and have one end in which th e gas outlet is disposed and the other end in which a short rib part coupled to the gas inlet is formed.

[24] The waste gas induction apparatus may further include a gas eruption groove disposed between the high-pressure gas chamber and the gas feeder. The gas feeder of the gas eruption groove region may have a curved guide surface for inducing the spray of a high-pressure gas formed therein. Brief Description of the Drawings

[25] Further objects and advantages of the invention can be more fully understood from the following detailed description taken in conjunction with the accompanying drawings in which:

[26] Fig. 1 is a cross-sectional view of a waste gas induction apparatus in the related art;

[27] Fig. 2 is an enlarge view of a region A in Fig. 1 ;

[28] Fig. 3 is a perspective view of a waste gas induction apparatus according to an embodiment of the present invention;

[29] Fig. 4 is a cross-sectional view of the waste gas induction apparatus according to an embodiment of the present invention;

[30] Fig. 5 is a view illustrating an electrical connection relationship within a control box; and

[31] Fig. 6 is a view illustrating an electrical connection relationship within a control box according to another example of the present invention. Best Mode for Carrying Out the Invention

[32] The present invention will now be described in detail in connection with an embodiment with reference to the accompanying drawings.

[33] Fig. 3 is a perspective view of a waste gas induction apparatus according to an embodiment of the present invention. Fig. 4 is a cross-sectional view of the waste gas induction apparatus according to an embodiment of the present invention. Fig. 5 is a view illustrating an electrical connection relationship within a control box.

[34] Referring to Figs. 3 to 5, the waste gas induction apparatus according to an embodiment of the present invention includes a waste gas inlet 110, a gas outlet 120 from which a waste gas is exhausted, a gas feeder 130 disposed between the gas inlet 110 and the gas outlet 120, for mixing a waste gas and an nitrogen gas of a high temperature and high-pressure state, a high-pressure gas chamber 140 of a high temperature high-pressure state, for supplying the nitrogen gas to the gas feeder 130, a heating chamber 150 disposed at one side of the high-pressure gas chamber 140, for heating the nitrogen gas, and a control box 200. The control box 200 includes a nitrogen injection port 210 for supplying the nitrogen gas to the high-pressure gas chamber 140, and a control circuit unit 220 for applying power to the heating chamber 150.

[35] The gas induction apparatus of the present embodiment further includes an eruption groove 160 for erupting the heated high-pressure gas of the high-pressure gas chamber 140 toward the gas feeder 130, a burn-prevention cap 170 disposed outside the gas inlet 110 and the gas outlet 120, a fixed rib 111 for fixing the gas feeder 130 within the gas inlet 110, and an electric heat lines 151 disposed within the heating chamber 150.

[36] In the waste gas induction apparatus constructed above according to the present embodiment, a waste gas of a low pressure, which is generated in a LCD and semiconductor manufacturing process, is introduced into the gas inlet 110. At this time, the heated nitrogen gas within the high-pressure gas chamber 140 is erupted from the gas inlet 110 to the gas outlet 120 through the eruption groove 160. An external waste gas is mixed with the nitrogen gas of a high temperature and is then discharged toward the outside through the gas outlet 120. In this case, the external waste gas can be discharged in a state where additional particles are not created by the nitrogen gas of a high temperature.

[37] As described above, the gas induction apparatus of a pneumatic type and a heating apparatus of an electric heat type are combined and are then applied to the valve of the waste gas exhaust line. Therefore, a mechanical opening and closing mode, such as an

existing bellows, and a complicate mechanical arrangement of the heating apparatus can be obviated. It is also possible to prevent unreacted byproducts from being accumulated within the vacuum pipe and the exhaust pipe.

[38] The gas inlet 110 has a hollow body and has a gas inlet 112 disposed at one side, as shown in Figs. 3 and 4. An input hole 114 for receiving an external high-pressure gas through the heating chamber 150 is formed at one side of the hollow body. The gas inlet 110 also has a groove in which the high-pressure gas chamber 140 becomes one side, corresponding to the input hole 114. A fixed rib 111 for fixing the gas feeder 130 is disposed at one side of the groove.

[39] Furthermore, a short rib part 113 that will be coupled to the gas outlet 120 is disposed at the other side of the gas inlet 110. The gas outlet 120 has a hollow body, as shown in Figs. 3 and 4. The gas outlet 120 has a gas outlet 121 disposed at one end and a short rib part 122, which is coupled to the gas inlet 110, disposed at the other side.

[40] Therefore, as shown in Fig. 4, the gas inlet 110 and the gas outlet 120 have their short rib parts 113, 122 connected each other. The short rib parts 113, 122 can be connected using a coupling member 180 such as a bolt or nut.

[41] The gas feeder 130 is disposed within the region where the gas inlet 110 and the gas outlet 120 are coupled as described above. To this end, an additional concave part is formed at the other side of the gas outlet 120, and a part of the gas feeder 130 is mounted in the concave part. Furthermore, the fixed rib 111 for fixing the gas feeder 130 is disposed in the gas inlet 110, as shown in Fig. 2. If the gas outlet 120 is additionally disposed as described above, it is not moved even when the gas feeder 130 is moved slightly, so that the purge amount is not affected. That is, fluctuation of a product due to some reasons can be prevented when the product is moved or installed. It is thus possible to prevent the change of a purge amount that is initially set.

[42] The gas feeder 130 has the concave part, which forms the high-pressure gas chamber 140 corresponding to the groove of the gas inlet 110, disposed at one end. As described above, the groove of the gas inlet 110 and the concave part of the gas feeder 130 are coupled to each other to form the high-pressure gas chamber 140. The gas eruption groove 160, which communicates with the high-pressure gas chamber 140 and supplies a high-pressure gas to the gas inlet 110, is disposed at the end of the groove and the concave part, i.e., at the end of the gas feeder 130.

[43] Furthermore, the gas feeder 130 of the eruption groove 160 has a curved guide surface 131 for inducing the spray of a high-pressure gas. That is, the high-pressure gas chamber 140 is built within the gas feeder 130, and the high-pressure gas chamber 140 and the curved guide surface 131 are coupled to the eruption groove 160.

[44] As described above, the high-pressure gas of the high-pressure gas chamber 140 can be erupted through the gas eruption groove 160, and the high-pressure gas erupted as

described above can be induced in a target direction through the curved guide surface 131. That is, if a gas is erupted from the high-pressure gas chamber 140, it flows along the curved guide surface 131. A waste gas that has been transferred from the gas inlet 110 is transferred with it being induced by the erupted gas.

[45] The high-pressure gas may include a nitrogen gas that does not react with the waste gas. The erupted nitrogen gas is mixed with the waste gas to prevent a temperature of the waste gas from falling. In the present invention, the heating chamber 150 that heats the erupted high-pressure gas and erupts it in a high temperature state is disposed.

[46] The heating chamber 150 extends up to the high-pressure gas chamber 140 through the region where the gas inlet 110 and the gas outlet 120 are coupled as shown in Figs. 3 and 4. Furthermore, a gas supply hole 152 connected to the nitrogen gas supply port 210 of the control box 200, for receiving an external gas is disposed at one side of the heating chamber 150.

[47] Furthermore, the electric heat lines 151 are wound on an inner surface of the heating chamber 150. The electric heat lines 151 are connected to the control circuit unit 220 of the control box 200. The heating chamber 150 is disposed on the outer circumferential surface of the heating chamber 150 so that it is connected to the high- pressure gas chamber 140, as described above. In this state, if electricity is applied to the electric heat lines 151 within the heating chamber 150 through the control circuit unit 220, the electric heat lines 151 are heated. Therefore, the electric heat lines 151 can heat a gas introduced into the high-pressure gas chamber 140 and the high-pressure gas chamber 140.

[48] A nitrogen gas or air of a normal temperature, which is supplied externally, is injected and then directly heated within the heating chamber 50. The heated nitrogen gas or air can keep constant a temperature of the vacuum pipe and the exhaust pipe having a predetermined length. A temperature where dust is created due to a fall of a temperature of a waste gas is about 8O ⁰ C. Therefore, the heated nitrogen gas or air can maintain a temperature of the waste gas to be higher than 8O ⁰ C while the waste gas passes through the vacuum pipe. It is thus possible to prevent generation of dust.

[49] In the present embodiment, it has been described that the high-pressure gas chamber

140 and the heating chamber 150 are separately disposed, but the present invention is not limited thereto. The high-pressure gas chamber 140 and the heating chamber 150 can be integrated into one.

[50] That is, since the heating chamber 150 and the high-pressure gas chamber 140 are interconnected, the heating chamber 150 and the high-pressure gas chamber 140 need not to be separated from each other. In the case where the electric heat lines 151, etc. is disposed in the high-pressure gas chamber 140, the high-pressure gas chamber 140 can serve as both the high-pressure gas chamber 140 and the heating chamber 150.

[51] Furthermore, in the present invention, the burn-prevention cap 170 is disposed outside the gas inlet 110 and the gas outlet 120 that are coupled to each other. However, as shown in Figs. 3 and 4, the burn-prevention cap 170 can have a stripe shape to surround the gas inlet 110 and the gas outlet 120 that are coupled, and has the control box 200 disposed at its both ends.

[52] That is, the control box 200 can be mechanically connected to the burn-prevention cap 170. A number of through holes are formed on a surface of the burn-prevention cap 170 in order to facilitate thermal exchange. It is thus possible to prevent a burn due to a temperature of the gas induction apparatus of the present embodiment.

[53] The control box 200 can be mechanically coupled to the gas inlet 110 and/or the gas outlet 120 as well as the burn-prevention cap 170.

[54] In the control box 200 is disposed the nitrogen injection port 210 connected to an external nitrogen tank and the control circuit 220. Furthermore, as shown in Fig. 5, the control circuit 220 includes a power supply port 221 connected to an external power source, for supplying power to the electric heat lines 151 disposed within the heating chamber 150, a switch element 222 disposed on one line of the power supply port 221, for controlling the operation of the electric heat lines 151, a bimetal unit 223 disposed on the other line of the power supply port 221 in order to prevent the heat of the electric heat lines 151 from excessively rising, and a LED lamp unit 224 that is connect ed to the two lines of the power supply port 221 and emits light.

[55] In accordance with the present invention, an external line is connected to the control box through the control box 200. Therefore, a heated waste gas can be injected into the vacuum pipe and the exhaust pipe, this can be accomplished through the design of a heater capacity by controlling bimetal without additional control means, and overheating of the electric heat lines can be prevented through bimetal without an additional controller. It is also possible to detect the operation of the waste gas induction apparatus through the LED lamp.

[56] The operation of the apparatus of the present embodiment will be described below in short. The waste gas induction apparatus of the present invention is installed at the pipe through which a waste gas is feed. The nitrogen supply pipe extending from the external nitrogen tank is connected to the nitrogen injection port 210 of the control box 200, and electricity is applied to the power supply port 221 of the control box 200.

[57] The switch element 222 of the control box 200 is turned on to heat the electric heat lines 150 of the heating chamber 150, and an external nitrogen gas is supplied. At this time, a waste gas is introduced through the gas inlet 110. The switch element 222 is turned on to heat D the electric heat lines 151 of the heating chamber 150. The electric heat lines 151 heats the nitrogen gas that has been injected through the nitrogen injection port 210 of the control box 200. That is, nitrogen gases filled in the high-

pressure gas chamber 140 are also heated.

[58] The heated nitrogen gas is erupted through the eruption groove 160 of the high- pressure gas chamber 140 simultaneously with the introduction of a waste gas, and is then moved in a direction of the gas outlet 120 along the curved guide surface 131 of the gas feeder 130 while being mixed with the waste gas.

[59] Since the nitrogen gas is sprayed at high pressure, the waste gas of the gas inlet 110 flows into the gas outlet 120 while being rapidly mixed with the nitrogen gas of a high temperature. While the nitrogen gas of a high temperature and the waste gas are mixed, the waste gas is heated. It is thus possible to prevent generation of dust due to a drop in temperature of the waste gas.

[60] In the present invention, the bimetal unit 223 within the control circuit unit 220 can prevent a temperature of the electric heat lines 151 from excessively rising. That is, if a temperature of the electric heat lines 151 is higher than a predetermined temperature, metal within the bimetal unit 223 is separated therefrom, thus shutting power applied to the electric heat lines 151. If a temperature of the electric heat lines 151 is lower than a predetermined temperature, metal within the bimetal unit 223 is coupled thereto, thus applying power to the electric heat lines 151.

[61] As described above, the bimetal unit 223 operates according to a temperature of the electric heat lines 151, can thus prevent overheating of the electric heat lines 151. This can be accomplished through the design of a heater capacity by controlling bimetal.

[62] Furthermore, according to the present invention, a dimmer switch for varying power applied to the electric heat lines in order to control a temperature can be disposed within the control circuit unit. This modified example will be described below with reference to Fig. 6.

[63] FIG. 6 is a circuit diagram illustrating the electrical connection relationship within a control box according to a modified example of the present invention.

[64] Referring to Fig. 6, a control circuit 220 within a control box 200 according to the modified example includes a power supply port 221 connected to an external power. The power supply port 221 has one end connected to a switch element 222 and the electric heat lines 151 through a dimmer switch 225 and the other end connected to the electric heat lines through a bimetal unit 223. As shown in Fig. 6, the power supply port 221 has one end connected to a second terminal of the switch element 222. A third terminal of the switch element 222 is connected to the dimmer switch 225. The dimmer switch 225 is connected to one end of the electric heat lines 151.

[65] Furthermore, the other end of the electric heat lines 151 and the bimetal unit 223 are connected, and the bimetal unit 223 is connected to the other end of the power supply port 221. At this time, a LED lamp unit 224 is connected between electric wires connecting the bimetal unit 223, the third terminal of the switch element 222 and the

dimmer switch 225. Furthermore, an electric wire connecting the bimetal unit 223 and the other end of the power supply port 221 is branched and then connected to a first terminal of the switch element 222.

[66] In the circuit constructed above, if external power is applied through the power supply port 221 connected to an external power source, the switch element 222 is turned on to apply power to the dimmer switch 225. That is, when the switch element 222 is turned on, power is applied to the dimmer switch 225.

[67] Power applied to the dimmer switch 225 has its voltage value changed by the dimmer switch 225 and is then applied to the electric heat lines 151. At this time, the dimmer switch 225 is a switch used a dimmer, in which the intensity of a voltage and current can be controlled. The dimmer switch 225 is used as a switch for controlling brightness of a general lighting.

[68] In the present modified example, however, the dimmer switch 225 is disposed between the switch element 222 and the electric heat lines 151, and it changes a voltage applied to the electric heat lines 151 by varying a voltage of the external power source.

[69] For example, in the case where a voltage of 100V is applied through the power supply port 221, a voltage of 80V or 50V, which is lower than 100V, is applied to the electric heat lines 151 by means of the dimmer switch 225, so that less heat in comparison with the application of 100V can be radiated.

[70] As described above, in accordance with the present invention, since a temperature of the heating chamber 150 in which the electric heat lines 151 are included can be controlled, an optimal temperature for radiating an exhaust gas can be kept constant.

[71] The apparatus of the present invention has a structure in which a small amount of air is made to pass through an amplification device in which two different feed units (i.e., the gas inlet and the gas outlet) are combined, so that ambient air can be adsorbed and blown in large quantity. That is, the amount and speed of a fluid using a pipe are amplified and forcedly feed using compressed air as a power source.

[72] Furthermore, in a process of generating incomplete unreacted byproducts other than normal reaction in a semiconductor or LCD manufacturing apparatus, unreacted byproducts, which are accumulated between a process chamber and a vacuum pump, within a subsequent exhaust line of the vacuum pump, within vacuum pipes disposed at the front and rear ends of a gas scrubber, and/or within an exhaust pipe, can be minimized. Overheating of the electric heat lines 151 can be prevented through the bimetal unit without an additional controller circuit. Furthermore, a voltage applied to the electric heat lines through the dimmer switch is varied to control a heating amount of the electric heat lines. It is thus possible to control a temperature of the heating chamber.

Industrial Applicability

[73] As described above, in accordance with the present invention, the gas inlet and the gas outlet are combined so that they are not moved even when the gas feeder and the gas inlet are moved. It is thus possible to keep constant a purge amount.

[74] Furthermore, the fixed rib that fixes the gas feeder is disposed within the gas inlet in order to prevent fluctuation due to various reasons including feed and installation. It is thus possible to prevent a change in a purge amount, which is initially set.

[75] Furthermore, the burn-prevention cap is disposed outside the gas inlet. A burn due to a high temperature of the heating chamber can be prevented.

[76] Furthermore, overheating of the electric heat lines can be prevented through the bimetal unit.

[77] Furthermore, a temperature of the heating chamber can be controlled using the dimmer switch.

[78] Furthermore, the heater capacity can be designed so that the relationship is established between a nitrogen gas pressure, an introduction amount and a set temperature.

[79] While the present invention has been described with reference to the particular illustrative embodiments, it is not to be restricted by the embodiments but only by the appended claims. It is to be appreciated that those skilled in the art can change or modify the embodiments without departing from the scope and spirit of the present invention.