Title:
GAS SENSOR USING MIM STRUCTURE, AND GAS DETECTION APPARATUS COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2021/153854
Kind Code:
A1
Abstract:
The present invention relates to a gas sensor using an MIM structure, and a gas detection apparatus comprising same, the gas sensor using an MIM structure comprises: a first metal layer; an insulator layer which is arranged below the first metal layer and which is optically transparent or semitransparent; and a second metal layer which is provided below the insulator layer and which is glossy, wherein: the thickness of the first metal layer changes by mean of the reaction of the first metal layer and a gas or the refractive index of the insulator layer changes by means of the reaction of the insulator layer and a gas; the thickness of the first metal layer changes by means of the gas so that color is displayed or the refractive index of the insulator layer changes by means of the gas so that color is displayed; and the gas detection apparatus comprising the gas sensor using an MIM structure comprises the gas sensor, a gas permeable layer which is provided on the gas sensor and through which gas passes, and a main body part to which the gas sensor is attached.
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Inventors:
AHN SUNG HOON (KR)
KIM YOUNG GYUN (KR)
CHO YOUNG GYUN (KR)
KIM YOUNG GYUN (KR)
CHO YOUNG GYUN (KR)
Application Number:
PCT/KR2020/007340
Publication Date:
August 05, 2021
Filing Date:
June 05, 2020
Export Citation:
Assignee:
SEOUL NAT UNIV R&DB FOUNDATION (KR)
International Classes:
G01N27/407; G01N33/00
Foreign References:
| KR20170094240A | 2017-08-17 | |||
| KR101797874B1 | 2017-11-15 | |||
| KR20190085989A | 2019-07-19 | |||
| US4836012A | 1989-06-06 | |||
| US6221673B1 | 2001-04-24 |
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
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