Title:
GAS SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/219179
Kind Code:
A1
Abstract:
The present invention addresses the problem of efficiently supplying, with a compact device configuration, a mixed gas of a component gas and a carrier gas. Mixed gas supply devices 1A, 1B comprise: an evaporator 10 that heats a liquid component and a carrier gas to generate a mixed gas of the carrier gas and a component gas in which the liquid component is vaporized; and a cooler 30 that cools the mixed gas generated by the evaporator 10 and supplies a mixed gas of the carrier gas and the component gas in which a supersaturated portion is condensed and separated. The evaporator 10 is provided with a shell-and-tube type heating mechanism. Carrier gas tubes 16, 17 having holes 16H, 17H opened in a plurality of locations for bubbling the carrier gas extend horizontally within a torso 11 of the evaporator 10. A liquid component supply port 20 is provided at a lower portion of the torso 11 of the evaporator 10, and an outlet port 23 through which the mixed gas of the carrier gas and the component gas in which the liquid component is vaporized is discharged is provided at an upper portion of the torso 11 of the evaporator 10. A lower portion of the cooler 30 is continuous with the outlet port 23 of the evaporator 10 through a piping 31.
More Like This:
Inventors:
MARUYA SHUHEI (JP)
MIURA MITSUYOSHI (JP)
MIURA MITSUYOSHI (JP)
Application Number:
PCT/JP2023/023767
Publication Date:
November 16, 2023
Filing Date:
June 27, 2023
Export Citation:
Assignee:
TOYOKO KAGAKU KK (JP)
TECHNO BOUNDARY CO (JP)
TECHNO BOUNDARY CO (JP)
International Classes:
C30B29/06; B01J7/02; C23C16/448; C30B25/14; F28C3/08; F28D7/16
Foreign References:
| JPH08187427A | 1996-07-23 | |||
| JP2000319095A | 2000-11-21 | |||
| JP2010284628A | 2010-12-24 | |||
| JP2013115208A | 2013-06-10 | |||
| JP2012000537A | 2012-01-05 |
Attorney, Agent or Firm:
TAJIME & TAJIME (JP)
Download PDF: