Title:
GATE STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD FOR PREPARING SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/041626
Kind Code:
A1
Abstract:
Disclosed in the present application are a gate structure, a semiconductor device, and a method for preparing a semiconductor device. The gate structure comprises a gate portion and a field plate portion, wherein the field plate portion comprises at least two field plate sub-portions; in a direction from the gate portion to the field plate portion, the gate portion and the field plate portion are each divided into two parts by a first plane; and in the two adjacent field plate sub-portions, on a plane where the bottom face of the gate portion away from a lower field plate sub-portion is located, the projection of a tail end point of a lower surface of the lower field plate sub-portion is located on the side of the projection of a start end point of a lower surface of an upper field plate sub-portion that is close to the first plane, and the start end point of the lower surface of the upper field plate sub-portion coincides with an end point where an upper surface of the lower field plate sub-portion is connected to the lower surface of the upper field plate sub-portion. In the gate structure of the present application, two adjacent field plate sub-portions are non-perpendicularly connected to each other, thereby achieving the effect of optimizing electric field distribution, and thus improving the reliability and stability of a semiconductor device.
Inventors:
QIAN HONGTU (CN)
GU QINGZHAO (CN)
PEI YI (CN)
ZHANG NAIQIAN (CN)
GU QINGZHAO (CN)
PEI YI (CN)
ZHANG NAIQIAN (CN)
Application Number:
PCT/CN2023/114844
Publication Date:
February 29, 2024
Filing Date:
August 25, 2023
Export Citation:
Assignee:
DYNAX SEMICONDUCTOR INC (CN)
International Classes:
H01L29/423; H01L21/28; H01L21/335; H01L29/40; H01L29/778
Foreign References:
| CN218632050U | 2023-03-14 | |||
| CN111952360A | 2020-11-17 | |||
| CN105938799A | 2016-09-14 | |||
| CN107331696A | 2017-11-07 | |||
| US20080128752A1 | 2008-06-05 |
Attorney, Agent or Firm:
BEIJING BRIGHT IP AGENCY CO., LTD. (CN)
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