GATED PHOTOCATHODE FOR CONTROLLED SINGLE AND MULTIPLE ELECTRON BEAM EMISSION

WIPO Patent Application WO1999050874

A3

A photocathode (300) having a gate electrode (307) so that modulation of the resulting electron beam is accomplished independently of the light beam (303). The photocathode includes a transparent substrate (301), a photoemitter (302), and an electrically separate gate electrode (307) surrounding an emission region of the photoemitter. The electron beam emission from the emission region is modulated by voltages supplied to the gate electrode. In addition, the gate electrode may have multiple segments that are capable of shaping the electron beam in response to voltages supplied individually to each of the multiple segments.

JP2006019577	EXPOSURE MASK AND MANUFACTURE OF SEMICONDUCTOR DEVICE
JP2006100304	MEASURED DATA RECOVERY METHOD, MEASUREMENT METHOD, EVALUATION METHOD, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
JP2009188013	ALIGNER

LEE KIM Y
CHANG TAI-HON PHILIP
MANKOS MARIAN
BERGLUND C NEIL

PCT/US1999/005584

February 17, 2000

March 16, 1999

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ETEC SYSTEMS INC (US)

G03F7/20; H01J1/34; H01J37/063; H01J9/12; H01J37/073; (IPC1-7): H01J37/073; H01J3/02; G03F7/20

US4460831A	1984-07-17
EP0642147A1	1995-03-08
US5751109A	1998-05-12

SCHNEIDER J E ET AL: "SEMICONDUCTOR ON GLASS PHOTOCATHODES AS HIGH-PERFORMANCE SOURCES FOR PARALLEL ELECTRON BEAM LITHOGRAPHY", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, vol. 14, no. 6, 1 November 1996 (1996-11-01), pages 3782 - 3786, XP000721111
CHANG T H P ET AL: "ELECTRON BEAM TECHNOLOGY - SEM TO MICROCOLUMN", MICROELECTRONIC ENGINEERING, vol. 32, no. 1/04, 1 September 1996 (1996-09-01), pages 113 - 130, XP000624903

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