Title:
GRAPHITE BOAT TRANSPORT MECHANISM USED IN PECVD APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/036488
Kind Code:
A1
Abstract:
A graphite boat transport mechanism used in a PECVD apparatus. The graphite boat transport mechanism comprises: a vertical column (1) fixed to one side within a PECVD apparatus (9); a boat-pushing mechanism (2) fixed to another side within the PECVD apparatus (9); and a lateral boat-discharging mechanism (6) fixed to a bottom of the PECVD apparatus (9). The column (1) is fixedly provided, at intervals from top to bottom, with a plurality of temporary storage areas (3). The temporary storage area (3) has a temporary storage area central line (31) in a vertical direction. The boat-pushing mechanism (2) has a horizontally-extending SiC paddle (4). An elevator channel area (5) is provided between the SiC paddle (4) and the temporary storage area (3). The column (1) is also provided with a robotic arm (7) that moves up and down along the column (1). The robotic arm (7) grasps a graphite boat from the SiC paddle (4) and transport the graphite boat to within the elevator channel area (5). The lateral boat-discharging mechanism (6) is fixed to the bottom of the PECVD apparatus (9) at a location directly below the temporary storage area (3). The graphite boat transport mechanism prevents collisions between the robotic arm and a graphite boat transported on the lateral boat-discharging mechanism when the robotic arm grasps a graphite boat from a low position on the SiC paddle and transports the grasped graphite boat to the elevator channel area.
Inventors:
XIAO YUENAN (CN)
ZHANG YONG (CN)
ZHANG YONG (CN)
Application Number:
PCT/CN2017/098530
Publication Date:
March 01, 2018
Filing Date:
August 22, 2017
Export Citation:
Assignee:
SHENZHEN HEADQUARTER S C NEW ENERGY TECH CORPORATION (CN)
International Classes:
C23C16/44
Foreign References:
| CN206052147U | 2017-03-29 | |||
| CN106128990A | 2016-11-16 | |||
| CN206076214U | 2017-04-05 | |||
| CN103681420A | 2014-03-26 | |||
| CN201756346U | 2011-03-09 | |||
| CN104377154A | 2015-02-25 | |||
| CN102653859A | 2012-09-05 | |||
| CN202380132U | 2012-08-15 | |||
| US20130109193A1 | 2013-05-02 |
Attorney, Agent or Firm:
SHENZHEN KANGHONG INTELLECTUAL PROPERTY AGENT CO., LTD (CN)
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