Title:
GRINDING HEAD, GRINDING DEVICE PROVIDED WITH SAME, AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/047690
Kind Code:
A1
Abstract:
Dust generated on a reverse face of a substrate by grinding with a grinder 96 is pushed out also toward the outer periphery of the grinder 96 by a centrifugal force. There, nitrogen gas is injected from an injection outlet 235. The dust adhering to the reverse face of the substrate is thus removed from the reverse face of the substrate. The dust is suctioned via a suction opening 237. Consequently, the dust is less likely to remain on the reverse face of the substrate, whereby a removal rate of the dust associated with grinding can be increased.
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Inventors:
ISHII HIROAKI (JP)
ISHII JUNICHI (JP)
ISHII JUNICHI (JP)
Application Number:
PCT/JP2022/018683
Publication Date:
March 30, 2023
Filing Date:
April 25, 2022
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
B24B55/06; B23Q11/00; B24B7/00; B24B7/02; B24B7/04; H01L21/304
Domestic Patent References:
| WO2021065102A1 | 2021-04-08 |
Foreign References:
| JP2003165042A | 2003-06-10 | |||
| JP2003236752A | 2003-08-26 | |||
| JP2019098503A | 2019-06-24 | |||
| JP2016221636A | 2016-12-28 |
Attorney, Agent or Firm:
SUGITANI Tsutomu (JP)
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