Title:
HEAT TREATMENT DEVICE AND HEAT TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2016/151651
Kind Code:
A1
Abstract:
In the present invention, an upper plate on which a substrate is placed is cooled or heated by a heat treatment unit. The temperature of the heat treatment unit is adjusted by a temperature adjustment unit. The temperature of the upper plate is detected. On the basis of the temperature thus detected, a control value to be given to the temperature adjustment unit for the purpose of maintaining the temperature of the upper plate at a set value is calculated as a control operation value. In the case where the control operation value is reduced to below a second threshold value, a first control of giving the control operation value to the temperature adjustment unit is performed. In the case where the control operation value is increased to be equal to or higher than a first threshold value, a second control of giving a control set value higher than the control operation value to the temperature adjustment unit is performed.
Inventors:
MOMMA TORU (JP)
FUKUMOTO YASUHIRO (JP)
NISHI KOJI (JP)
GOTO SHIGEHIRO (JP)
JO KENICHIRO (JP)
TANAKA ATSUSHI (JP)
FUKUMOTO YASUHIRO (JP)
NISHI KOJI (JP)
GOTO SHIGEHIRO (JP)
JO KENICHIRO (JP)
TANAKA ATSUSHI (JP)
Application Number:
PCT/JP2015/005727
Publication Date:
September 29, 2016
Filing Date:
November 17, 2015
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/027
Foreign References:
| JPH10335209A | 1998-12-18 | |||
| JP2005033178A | 2005-02-03 |
Attorney, Agent or Firm:
FUKUSHIMA, Yoshito (JP)
Yoshihito Fukushima (JP)
Yoshihito Fukushima (JP)
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