Title:
HEATER BLOCK AND SUBSTRATE HEATING DEVICE INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2024/063402
Kind Code:
A1
Abstract:
The present invention relates to a heater block capable of precise control of a heating temperature and a substrate device including the heater block. The heater block may include: a first laser module having multiple laser cells; a second laser module which has multiple laser cells and is provided around the first laser module; and a first and a second power source part for independently supplying power to the first laser module and the second laser module, respectively, wherein at least one among the first laser module and the second laser module is divided into multiple control areas each of which includes the one or more laser cells sharing an input terminal to which power is input, and the multiple control areas are controlled independently from each other.
Inventors:
LEE DAE RYONG (KR)
MOON YONG SOO (KR)
KIM SUNG CHUL (KR)
JI SANG HYUN (KR)
KIM CHANG KYO (KR)
MOON YONG SOO (KR)
KIM SUNG CHUL (KR)
JI SANG HYUN (KR)
KIM CHANG KYO (KR)
Application Number:
PCT/KR2023/013348
Publication Date:
March 28, 2024
Filing Date:
September 06, 2023
Export Citation:
Assignee:
AP SYSTEMS INC (KR)
International Classes:
H01L21/67; H01S5/183
Foreign References:
| KR102189250B1 | 2020-12-09 | |||
| KR20130128859A | 2013-11-27 | |||
| JP2003077857A | 2003-03-14 | |||
| KR20220097750A | 2022-07-08 | |||
| KR100729006B1 | 2007-06-14 |
Attorney, Agent or Firm:
AHN, Joon-Hyung (KR)
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