Title:
HIGHLY CLEAN ENVIRONMENTAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/037156
Kind Code:
A1
Abstract:
Disclosed is a highly clean environmental device which is capable of obtaining clean space at a very high cleanliness level of class 1 or in excess of the class 1, and of maintaining the clean space at the same oxygen concentration as that of the installation environment of the highly clean environmental device with a very simple configuration without using a giant clean room.
A fan filter unit (12) is provided onto the top surface of a surrounding body (11), and a feedback gas flow path (14) is provided so as to connect a ventilating hole (13) provided to the bottom of the side wall of the surrounding body (11) and the entrance of the fan filter unit (12). Part of the wall of the surrounding body (11) is configured by a barrier (15) which does not allow the passage of as many as 100% of dust fine particles, but allows the passage of gas molecules. A hermetic fastener (16) is provided to the wall of the surrounding body (11) so as to enable a person to enter and leave the surrounding body (11) by the opening/closing of the hermetic fastener (16).
Inventors:
ISHIBASHI AKIRA (JP)
Application Number:
PCT/JP2010/066483
Publication Date:
March 31, 2011
Filing Date:
September 24, 2010
Export Citation:
Assignee:
STEC CORP C (JP)
ISHIBASHI AKIRA (JP)
ISHIBASHI AKIRA (JP)
International Classes:
F24F3/16; F24F7/06
Domestic Patent References:
| WO2008136215A1 | 2008-11-13 |
Foreign References:
| JP2007187436A | 2007-07-26 | |||
| JP2006255529A | 2006-09-28 |
Attorney, Agent or Firm:
MORI, Koh-ichi (JP)
Moriyuki 1 (JP)
Moriyuki 1 (JP)
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