Title:
HOLLOW MICROBALLOONS
Document Type and Number:
WIPO Patent Application WO/2021/201089
Kind Code:
A1
Abstract:
Hollow microballoons according to the present invention are formed from a resin obtained by polymerizing a polymerizable composition including: a polyrotaxane monomer having at least two polymerizable functional groups in the molecules thereof; and a polymerizable monomer other than said polyrotaxane monomer having at least two polymerizable functional groups in the molecules thereof. Using the hollow microballoons according to the present invention makes it possible to provide a CMP polishing pad having excellent polishing characteristics and durability.
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Inventors:
SHIMIZU YASUTOMO (JP)
KAWASAKI TAKAYOSHI (JP)
KAWASAKI TAKAYOSHI (JP)
Application Number:
PCT/JP2021/013798
Publication Date:
October 07, 2021
Filing Date:
March 31, 2021
Export Citation:
Assignee:
TOKUYAMA CORP (JP)
International Classes:
C08L101/00; H01L21/304
Domestic Patent References:
| WO2019221249A1 | 2019-11-21 | |||
| WO2019198675A1 | 2019-10-17 | |||
| WO2020032056A1 | 2020-02-13 |
Attorney, Agent or Firm:
TAGUCHI, Masahiro et al. (JP)
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