Title:
HYBRID MEMS FABRICATION METHOD AND NEW OPTICAL MEMS DEVICE
Document Type and Number:
WIPO Patent Application WO2003031321
Kind Code:
A3
Abstract:
A new hybrid method of fabricating optical micro electro mechanical system (MEMS) devices is disclosed that uses both bulk and surface micromachining techniques, and a new optical MEMS device is also disclosed that is fabricated using the new method. The method includes the step of mounting a handle layer to one or more layers of MEMS structural material (12). Layers of structural and sacrificial material are then built up on the MEMS structural material using surface micromachining techniques (14). Drive electronics are mounted to the layers of structural and sacrificial material (17). The handle layer is removed (18) to reveal the MEMS structural layer and the sacrificial material within the various layers is dissolved (20). The new method is particularly applicable to fabricating optical MEMS devices, with the handle layer (54) being adjacent to a Si mirror layer (52). The surface micromachining layers form electrode (66) and spring structures (67, 68). Drive electronics (92) are then mounted on the layers of structural material, so that a bias can be applied to the MEMS structures. The handle layer (54) is removed from the mirror layer (52) to reveal the mirror's reflective surface, and the sacrificial material (64) is dissolved away, freeing the MEMS structures to operate. For optical or other MEMS arrays, a linking framework (70) can be included to attach the MEMS devices.
Inventors:
DE NATALE JEFFREY F
Application Number:
PCT/US2002/022782
Publication Date:
October 09, 2003
Filing Date:
July 17, 2002
Export Citation:
Assignee:
INNOVATIVE TECH LICENSING LLC (US)
International Classes:
B81B3/00; B81C1/00; G02B26/08; G02B6/35; (IPC1-7): B81B3/00; G02B26/08
Foreign References:
| US5699181A | 1997-12-16 |
Other References:
SU G D J ET AL: "Surface-micromachined 2D optical scanners with optically flat single-crystalline silicon micromirrors", SILICON-BASED AND HYBRID OPTOELECTRONICS III, SAN JOSE, CA, USA, 23-24 JAN. 2001, PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 2001, SPIE-INT. SOC. OPT. ENG, USA, PAGE(S) 46 - 53,, ISSN: 0277-786X, XP009013719
KUBBY J ET AL: "HYBRID INTEGRATION OF LIGHT EMITTERS AND DETECTORS WITH SOI BASED MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS (MOEMS)", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, VOL. 4293, PAGE(S) 32-45,, XP009008590
KUBBY J ET AL: "HYBRID INTEGRATION OF LIGHT EMITTERS AND DETECTORS WITH SOI BASED MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS (MOEMS)", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, VOL. 4293, PAGE(S) 32-45,, XP009008590
Download PDF: