Title:
ILLUMINATION OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, EXPOSURE DEVICE, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2006/059549
Kind Code:
A1
Abstract:
There is provided an illumination optical device capable of illuminating a surface to be irradiated, with light of a desired polarization state while preferably suppressing a change of the polarization state of the light in the illumination optical path. The illumination optical device illuminates the surface to be irradiated (M, W) according to the light supplied from a light source (1). The illumination optical device includes polarization setting units (3, 7) arranged in the optical path between the light source and the surface to be irradiated, for setting the polarization state of the light reaching the surface to be irradiated, to a predetermined polarization state. Each of light transmitting members arranged in the optical path between the deflection setting unit and the surface to be irradiated is formed by an optical material having double refraction amount generated by internal distortion suppressed to 5 nm/cm or below.
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Inventors:
SHIGEMATSU KOJI (JP)
Application Number:
PCT/JP2005/021693
Publication Date:
June 08, 2006
Filing Date:
November 25, 2005
Export Citation:
Assignee:
NIKON CORP (JP)
SHIGEMATSU KOJI (JP)
SHIGEMATSU KOJI (JP)
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| WO2002016993A1 | 2002-02-28 | |||
| WO2001065296A1 | 2001-09-07 |
Foreign References:
| JP2004179172A | 2004-06-24 | |||
| JP2001274083A | 2001-10-05 | |||
| JPH09184918A | 1997-07-15 |
Attorney, Agent or Firm:
Yamaguchi, Takao (10 Kanda-tsukasacho 2-chom, Chiyoda-ku Tokyo 48, JP)
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