INERTIAL SENSOR

WIPO Patent Application WO/2014/061099

A1

The present invention is a configuration in which signals generated by application of acceleration other than a measurement signal are offset each other before being inputted to an LSI circuit, thereby preventing a breakdown of an inertial sensor due to malfunction and false output. A capacitance-type MEMS acceleration sensor (100) has a configuration comprising: a movable part (104); a P-side first electrode pair of a detection movable electrode (105a) and a detection fixed electrode (106a); a P-side second electrode pair of a detection movable electrode (105b) and a detection fixed electrode (106b); an N-side first electrode pair of a detection movable electrode (109a) and a detection fixed electrode (110a); and an N-side second electrode pair of a detection movable electrode (109b) and a detection fixed electrode (110b). The movable part (104) is supported at one point of a fixed section (101) provided inside the movable part (104), the fixed section (101) of the movable part (104), a fixed section (107) of the detection fixed electrode (106a), a fixed section (108) of the detection fixed electrode (106b), a fixed section (111) of the detection fixed electrode (110a), and a fixed section (112) of the detection fixed electrode (110b) are disposed on a straight line (116) perpendicular to a detection direction (115) of the MEMS acceleration sensor (100), and with respect to the fixed section (101) of the movable part (104), the P-side first electrode pair and the N-side first electrode pair are provided on one side, and the P-side second electrode pair and the N-side second electrode pair are provided on the other side.

JP2023510319	MEMS devices built using BEOL metal layers in solid-state semiconductor processes
JPH10170544	C/V CONVERSION CIRCUIT AND ACCELERATION SENSOR USING THE C/V CONVERSION CIRCUIT
WO/2022/264796	ACCELERATION SENSOR

YAMANAKA KIYOKO (JP)
JEONG HEEWON (JP)
HAYASHI MASAHIDE (JP)

PCT/JP2012/076691

April 24, 2014

October 16, 2012

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HITACHI AUTOMOTIVE SYSTEMS LTD (JP)

G01P15/125; G01P21/00

US20110083506A1	2011-04-14
JPH10111312A	1998-04-28
JP2008292363A	2008-12-04
JP2001147236A	2001-05-29
JP2011053020A	2011-03-17
JP2004347499A	2004-12-09
US20060032310A1	2006-02-16
JP2010513888A	2010-04-30
JP2010513888A	2010-04-30

See also references of EP 2910952A4

TSUTSUI, YAMATO (JP)
Tsutsui Daiwa (JP)

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