Title:
INSPECTION APPARATUS AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/145048
Kind Code:
A1
Abstract:
An inspection apparatus that inspects a sample in which a plurality of light-emitting elements are formed on a substrate, wherein: the inspection apparatus comprises a light source unit that generates excitation light with which the light-emitting elements are irradiated, a camera that detects light emitted by the light-emitting elements irradiated with the excitation light, a keyboard that receives input of information pertaining to the color of the light emitted by the light-emitting elements, and a control device that determines the wavelength of the excitation light on the basis of the information pertaining to the color of the emitted light as received by the keyboard and controls the light source unit so that excitation light having said wavelength is generated; and the control device determines, as the wavelength of the excitation light, a wavelength that is greater than the absorption-edge wavelength of the substrate of the sample and less than the peak wavelength of the emission spectrum of the light-emitting elements specified from the information pertaining to the color of the emitted light.
Inventors:
NAKAMURA TOMONORI (JP)
IKEMURA KENICHIRO (JP)
IKEMURA KENICHIRO (JP)
Application Number:
PCT/JP2020/040255
Publication Date:
July 22, 2021
Filing Date:
October 27, 2020
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01N21/64; G01N21/88; G01N21/956
Foreign References:
| JP2015010834A | 2015-01-19 | |||
| JPH08316577A | 1996-11-29 | |||
| US20160197044A1 | 2016-07-07 | |||
| JP2018132308A | 2018-08-23 |
Other References:
See also references of EP 4080199A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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