Title:
INSPECTION DEVICE AND LIGHT IRRADIATION DEVICE FOR INSPECTION
Document Type and Number:
WIPO Patent Application WO/2023/248953
Kind Code:
A1
Abstract:
Provided is a light irradiation device 100 for inspection capable of contributing to an improvement in size reduction, output stability, inspection accuracy, etc. The light irradiation device comprises: a plurality of laser light sources 2 mounted in a predetermined direction; a reflective member 3 having a reflective surface 3a which diffuses and reflects laser light L output from the laser light sources 2; and a diffusion member 4 which diffuses and transmits the laser light diffused and reflected by the reflective surface 3a and emits the light to the outside, wherein the laser light sources 2 are disposed so as to emit laser light L obliquely to the reflective surface 3a, and disposed so that the angle formed by a direction in which the orientation angle of the laser light L is wide and the mounting direction of the laser light sources 2 is smaller than the angle formed by a direction in which the orientation angle of the laser light L is narrow and the mounting direction.
Inventors:
KOYAMA TAKAHIKO (JP)
Application Number:
PCT/JP2023/022455
Publication Date:
December 28, 2023
Filing Date:
June 16, 2023
Export Citation:
Assignee:
CCS INC (JP)
International Classes:
G01N21/84; F21S2/00; F21Y115/30
Foreign References:
| JP2006208053A | 2006-08-10 | |||
| JPH01240863A | 1989-09-26 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei et al. (JP)
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