Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/008051
Kind Code:
A1
Abstract:
To prevent throughput reduction resulting from the provision of an idling period when an internal operation speed of a detection system is switched, a defect inspection device is provided with: a light irradiation unit for irradiating illumination light onto a sample placed on a table unit; a detection optical system for forming an image of light scattered by the sample and detecting the scattered light image using an image sensor; an image processing unit for receiving the signal from the image sensor of the detection optical system that has detected the scattered light image, generating a scattered light image, and detecting a sample defect by processing the generated image; an output unit for outputting the image that has been processed by the image processing unit and includes the defect; and a control unit for controlling the table part, the light irradiation unit, the detection optical system, and the image processing unit. The image processing unit is provided with an image generation unit for receiving the signal from the image sensor and generating a scattered light image, an image correction unit for correcting color unevenness occurring in the scattered light image generated by the image generation unit, and a defect detection unit for detecting a sample defect by processing the image that has had the color unevenness thereof corrected by the image correction unit.
Inventors:
KANAI HISAAKI (JP)
MAKUUCHI MASAMI (JP)
MOHARA YUKIHISA (JP)
IMAI EIJI (JP)
MAKUUCHI MASAMI (JP)
MOHARA YUKIHISA (JP)
IMAI EIJI (JP)
Application Number:
PCT/JP2016/069731
Publication Date:
January 11, 2018
Filing Date:
July 04, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N21/956; G01N21/88; H01L21/66
Foreign References:
| JP2002310934A | 2002-10-23 | |||
| JP2001194323A | 2001-07-19 | |||
| JP2012181135A | 2012-09-20 | |||
| JPS6424564A | 1989-01-26 | |||
| JPS53134484A | 1978-11-24 | |||
| JP2006084189A | 2006-03-30 | |||
| JPS60245240A | 1985-12-05 |
Attorney, Agent or Firm:
SEIRYO I.P.C. (JP)
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