Title:
INSPECTION SYSTEM, INSPECTION METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2020/110712
Kind Code:
A1
Abstract:
This inspection system is provided with an autofocus processing unit, an inspection unit for inspecting an object on the basis of an inspection image generated when a focal position is adjusted to a focusing position, and a setting unit for setting autofocus processing condition data in accordance with at least one of the variety of the object and the portion thereof to be inspected. The autofocus processing unit executes autofocus processing in accordance with the condition data. The focal position can thereby be easily adjusted in accordance with the variety of the object and the portion thereof to be inspected, and a focused image of the object can be obtained.
Inventors:
IMANISHI NOBUTAKA (JP)
KATO YUTAKA (JP)
KATO YUTAKA (JP)
Application Number:
PCT/JP2019/044393
Publication Date:
June 04, 2020
Filing Date:
November 12, 2019
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
International Classes:
G02B7/28; G01N21/88; G02B7/36; G03B13/36
Foreign References:
| JP2012003197A | 2012-01-05 | |||
| JP2014130221A | 2014-07-10 | |||
| JP2014215582A | 2014-11-17 | |||
| JP2017116459A | 2017-06-29 | |||
| JP2011034360A | 2011-02-17 | |||
| JP2010134915A | 2010-06-17 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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