Title:
ION DETECTION DEVICE FOR MASS ANALYSIS, ION DETECTION METHOD, AND PRODUCTION METHOD FOR ION DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/125669
Kind Code:
A1
Abstract:
Provided are an ion detection device, an ion detection method, and a production method for the ion detection device, wherein the effect of an electric field to bring ions to be detected toward a first-stage electrode of a secondary electron multiplier is improved and the effect of stray-light reduction is also improved. The ion detection device includes the secondary electron multiplier which includes a plurality of electrodes, and a bring-in electrode which brings ions toward the first-stage electrode of the secondary electron multiplier. When ions are brought into the ion detection device, at least either the area of the bring-in electrode or the difference in potential between the bring-in electrode and an electrode that is disposed around the bring-in electrode and the secondary electron multiplier does not have is set so that the intensity of internal stray-light that is produced inside the ion detection device and falls on the first-stage electrode is below the intensity of external stray-light that is produced outside the ion detection device and falls on the first-stage electrode.
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Inventors:
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
Application Number:
PCT/JP2009/058462
Publication Date:
November 04, 2010
Filing Date:
April 30, 2009
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
International Classes:
H01J49/06; G01T1/28; H01J43/06
Foreign References:
| JPH08138621A | 1996-05-31 | |||
| JPH06267497A | 1994-09-22 | |||
| JPH087829A | 1996-01-12 | |||
| JPH03289037A | 1991-12-19 |
Attorney, Agent or Firm:
OKABE Masao et al. (JP)
Okabe Masao (JP)
Okabe Masao (JP)
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