Title:
ION DETECTION DEVICE AND ION DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2010/125670
Kind Code:
A1
Abstract:
Provided is an ion detection device comprising a mechanism for converting ions into electrons and amplifying the electrons obtained by the conversion, which enables a reduction in noise caused by stray light.
The ion detection device is provided with an ion-electron conversion electrode which converts mass-fractionated ions into electrons, and an amplification mechanism which is configured so as to amplify the electrons, the amplification mechanism leading the electrons obtained by the conversion by the ion-electron conversion electrode thereinto by an electric field and amplifying the electrons. The ion-electron conversion electrode has any one of a needle shape, a ribbon shape, a mesh shape, or a slit shape.
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Inventors:
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
Application Number:
PCT/JP2009/058464
Publication Date:
November 04, 2010
Filing Date:
April 30, 2009
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
International Classes:
H01J49/06; H01J43/10; H01J43/18; H01J43/22; H01J49/42
Foreign References:
| JPS6240147A | 1987-02-21 | |||
| JPH087832A | 1996-01-12 | |||
| JP2001351565A | 2001-12-21 |
Attorney, Agent or Firm:
OKABE Masao et al. (JP)
Okabe Masao (JP)
Okabe Masao (JP)
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