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Title:
ION GUN AND VACUUM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/018840
Kind Code:
A1
Abstract:
An ion gun has: an anode; a cathode having a first portion and a second portion facing the anode; and a magnet that forms a spatial magnetic field between the first portion and the second portion. A circular gap that includes a straight-line section and a curved section is provided between the first portion and the second portion of the cathode. Between a first portion and a second portion of the curved section, the magnet forms a magnetic beam having a bottom closer to the inner side than the cross-sectional center line of the gap.

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Inventors:
HIROISHI TSUTOMU (JP)
Application Number:
PCT/JP2020/028362
Publication Date:
January 27, 2022
Filing Date:
July 22, 2020
Export Citation:
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Assignee:
CANON ANELVA CORP (JP)
International Classes:
H01J27/14
Domestic Patent References:
WO2019182111A12019-09-26
Foreign References:
US20120187843A12012-07-26
CN109065429A2018-12-21
US5763989A1998-06-09
JP2008053116A2008-03-06
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (JP)
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