Title:
JOINED BODY OF PIEZOELECTRIC SINGLE-CRYSTAL SUBSTRATE AND SUPPORT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2019/220713
Kind Code:
A1
Abstract:
[Problem] A joined body 8 (8A) of a support substrate 3 and a piezoelectric single-crystal substrate 1 (1A) comprising lithium niobate or the like, wherein warping of the joined body during heating is suppressed. [Solution] A joined body 8 (8A) is provided with: a support substrate 3; a piezoelectric single-crystal substrate 1 (1A) comprising a material selected from the group consisting of lithium niobate, lithium tantalate, and lithium niobate-lithium tantalate; and an amorphous layer 7 interposed between the support substrate 3 and the piezoelectric single-crystal substrate 1 (1A), the amorphous layer 7 including one or more types of metal atoms selected from the group consisting of niobium and tantalum, an atom constituting the support substrate 3, and an argon atom. The concentration of argon atoms in the center of the amorphous layer 7 is higher than the concentration of argon atoms in the peripheral edge part of the amorphous layer 7.
Inventors:
TAI TOMOYOSHI (JP)
HATTORI RYOSUKE (JP)
HATTORI RYOSUKE (JP)
Application Number:
PCT/JP2019/004999
Publication Date:
November 21, 2019
Filing Date:
February 13, 2019
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
C04B37/00; H01L41/187; H01L41/337; H03H9/25
Domestic Patent References:
| WO2014077213A1 | 2014-05-22 | |||
| WO2017155002A1 | 2017-09-14 |
Attorney, Agent or Firm:
HOSODA Masutoshi et al. (JP)
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