Title:
LASER APPARATUS, METHOD FOR CONTROLLING WAVELENGTH OF LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/199513
Kind Code:
A1
Abstract:
This laser apparatus comprises: a first wavelength-variable semiconductor laser that outputs a first, continuous-wave laser light; a first amplifier that performs pulsing and amplification of the first laser light to output a first pulsed laser light; a wavelength conversion system which performs wavelength conversion using the first pulsed laser light to output a second pulsed laser light; an excimer amplifier that amplifies the second pulsed laser light to output a third pulsed laser light; a monitor module that measures the wavelength of the third pulsed laser light; and a processor which periodically changes a target wavelength for the third pulsed laser light, and controls a current for changing the wavelength of the first semiconductor laser on the basis of a measurement value of the wavelength of the third pulsed laser light that has been output with the same target wavelength so that the wavelength of the third pulsed laser light becomes the target wavelength.
Inventors:
NOGIWA SEIJI (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2022/017922
Publication Date:
October 19, 2023
Filing Date:
April 15, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/00; H01S3/10
Domestic Patent References:
| WO2020095418A1 | 2020-05-14 | |||
| WO2020110177A1 | 2020-06-04 |
Foreign References:
| JP2013062484A | 2013-04-04 | |||
| JP2012182434A | 2012-09-20 | |||
| US20060171439A1 | 2006-08-03 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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