Title:
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/199514
Kind Code:
A1
Abstract:
This laser device comprises a first semiconductor laser which outputs first laser light at a continuous oscillation, a first amplifier which pulsates and amplifies the first laser light, a wavelength conversion system which converts the wavelength of first pulse laser light output from the first amplifier and outputs second pulse laser light, an excimer amplifier which amplifies second pulse laser light, a monitor module which measures the wavelength of third pulse laser light output from the excimer amplifier, and a processor which: calculates a central wavelength that is the average value of a wavelength measurement value at the time of reaching a first target wavelength and a wavelength measurement value at the time of reaching a second target wavelength, and the difference in wavelength therebetween; calculates an average current value of the first semiconductor laser so that the difference between a target central wavelength and the central wavelength becomes small; calculates a current value difference so that the target wavelength difference and the wavelength difference becomes small; calculates a first current value at the time of reaching the first target wavelength and a second current value at the time of reaching the second target wavelength from the average current value and the current value difference; and controls the first semiconductor laser.
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Inventors:
NOGIWA SEIJI (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2022/017923
Publication Date:
October 19, 2023
Filing Date:
April 15, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/00; H01S3/10
Domestic Patent References:
| WO2020095418A1 | 2020-05-14 | |||
| WO2020110177A1 | 2020-06-04 |
Foreign References:
| JP2013062484A | 2013-04-04 | |||
| JP2004086193A | 2004-03-18 | |||
| US20060171439A1 | 2006-08-03 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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