Title:
LASER SE BATTERY PRODUCTION LINE
Document Type and Number:
WIPO Patent Application WO/2021/032217
Kind Code:
A2
Abstract:
Disclosed in the present invention is a laser SE battery production line, comprising, sequentially arranged: a laser doper, a chain oxidation furnace, and a chain etcher. Conveyance mechanisms for said three devices are sequentially connected. A silicon wafer can be conveyed in relay by the conveyance mechanisms of the three devices. The silicon wafer output by the laser doper after laser doping treatment can be directly input to the chain oxidation furnace, and the silicon wafer output by the chain oxidation furnace after thermal oxidation treatment can be directly input to the chain etcher. A silicon wafer in the chain oxidation furnace can be oxidized during a conveyance process of a second conveyance mechanism, and thus the chain oxidation furnace can produce continuously, which can greatly increase production capacity. In addition, in the present invention, a quartz boat is not required to be used to bear the silicon wafer, thus being able to eliminate the motion of wafer insertion and picking in a quartz boat, which can greatly reduce the incidence of breakage of silicon wafers.
Inventors:
FU LIMING (CN)
REN CHANGRUI (CN)
WANG MIN (CN)
CHEN YING (CN)
REN CHANGRUI (CN)
WANG MIN (CN)
CHEN YING (CN)
Application Number:
PCT/CN2020/121202
Publication Date:
February 25, 2021
Filing Date:
October 15, 2020
Export Citation:
Assignee:
CHANGZHOU SHICHUANG ENERGY CO LTD (CN)
International Classes:
H01L31/18; H01L21/67
Attorney, Agent or Firm:
SUZHOU MAMBO PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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