Title:
LIGHT DEFLECTOR AND MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/246245
Kind Code:
A1
Abstract:
Provided is a light deflector that can suppress cleavage of a radius provided at a joint of a torsion bar 12. The light deflector 10 includes a mirror section 11, a pair of torsion bars 12, an inside piezoelectric actuator 13, and a movable frame section 14. The crystal orientation in the axial direction of the torsion bar 12 is <100>. Radii 31ab, 31bb are formed at joint edges of the torsion bars 12 and the inside piezoelectric actuator 13, so as to each have a curved surface that is oriented in <110> and recessed inward. The waviness associated with a roughness curve derived from the curved surfaces is set to be within 600 nm.
Inventors:
AKIYAMA KEITA (JP)
Application Number:
PCT/JP2020/019976
Publication Date:
December 10, 2020
Filing Date:
May 20, 2020
Export Citation:
Assignee:
STANLEY ELECTRIC CO LTD (JP)
International Classes:
G02B26/10; B81B3/00; B81C1/00; G02B26/08
Domestic Patent References:
| WO2010131557A1 | 2010-11-18 |
Foreign References:
| JP2006319387A | 2006-11-24 | |||
| JP2012063413A | 2012-03-29 | |||
| JP2014102354A | 2014-06-05 | |||
| US20070008401A1 | 2007-01-11 | |||
| JP2017151476A | 2017-08-31 |
Other References:
See also references of EP 3982186A4
Attorney, Agent or Firm:
SATO & ASSOCIATES (JP)
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