Title:
LIGHT DETECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/014326
Kind Code:
A1
Abstract:
A first imaging device according to an embodiment of the present disclosure comprises: a semiconductor substrate having first and second surfaces opposite to each other and a plurality of pixels arranged in a matrix; a plurality of photoelectric conversion units that are embedded and formed in the semiconductor substrate for the respective pixels and that generate charges corresponding to a received light amount through photoelectric conversion; a plurality of floating diffusion layers that are provided between adjacent ones of the pixels on the first surface of the semiconductor substrate and that temporarily hold the charges generated in the photoelectric conversion units provided to the adjacent ones of the pixels; a first groove that is provided so as to surround the pixels sharing the floating diffusion layers and that penetrate the semiconductor substrate from the first surface to the second surface; a second groove that is provided above at least the floating diffusion layers, that extends from the second surface to the first surface of the semiconductor, and that has the bottom thereof in the semiconductor substrate; and an oxidized film provided in contact with the bottom of the second groove.
Inventors:
MIYANAMI YUKI (JP)
NISHIO KENYA (JP)
SAITO SUGURU (JP)
YOSHIDA SHINICHI (JP)
ENOMOTO TAKAYUKI (JP)
KUBO SHINJI (JP)
WATANABE KYONOSUKE (JP)
HIRAMATSU KATSUNORI (JP)
HAYASHI TOSHIHIKO (JP)
NISHIO KENYA (JP)
SAITO SUGURU (JP)
YOSHIDA SHINICHI (JP)
ENOMOTO TAKAYUKI (JP)
KUBO SHINJI (JP)
WATANABE KYONOSUKE (JP)
HIRAMATSU KATSUNORI (JP)
HAYASHI TOSHIHIKO (JP)
Application Number:
PCT/JP2023/024506
Publication Date:
January 18, 2024
Filing Date:
June 30, 2023
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L27/146; H04N25/70
Domestic Patent References:
| WO2021100675A1 | 2021-05-27 | |||
| WO2017130723A1 | 2017-08-03 |
Foreign References:
| JP2016187007A | 2016-10-27 | |||
| US20150372031A1 | 2015-12-24 | |||
| JP2013175494A | 2013-09-05 | |||
| JP2014116472A | 2014-06-26 |
Attorney, Agent or Firm:
TSUBASA PATENT PROFESSIONAL CORPORATION (JP)
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